The effects of humidity on the stability of LTCC pressure sensors

Metrology and Measurement Systems

Volumn 19, Issue 1, 2012, Pages 133-140

  Zarnik, Marina Santo ^a,b,c,d   Belavic, Darko ^a,b,c,d  

^a HIPOT RR   (Slovenia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

^c Centre of Excellence Namaste   (Slovenia)

^d INMedica   (Slovenia)

Author keywords

Capacitive pressure sensors; Offset stability; Relative humidity; Thick film piezoresistive sensors

Indexed keywords

ATMOSPHERIC HUMIDITY; PRESSURE SENSORS; STABILITY; THICK FILMS;

CAPACITIVE PRESSURE SENSORS; DIFFERENTIAL MODE; EXPERIMENTAL AND NUMERICAL ANALYSIS; INFLUENCE OF HUMIDITY; OFFSET STABILITIES; PIEZO-RESISTIVE SENSORS; SENSING CAPACITORS; THICK-FILM PIEZORESISTIVE SENSORS;

CAPACITIVE SENSORS;

EID: 84858673544     PISSN: 08608229     EISSN: None     Source Type: Journal    
DOI: 10.2478/v10178-012-0012-0     Document Type: Article

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