LTCC microfluidic system

International Journal of Applied Ceramic Technology

Volumn 3, Issue 2, 2006, Pages 150-156

  Golonka, Leszek J ^a   Zawada, Tomasz ^a   Radojewski, Jacek ^a   Roguszczak, Henryk ^a   Stefanow, Marcin ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE; LIGHT SOURCES; LIGHT TRANSMISSION; OPTICAL FIBERS; OPTICAL SYSTEMS; PHOTODETECTORS; SENSORS;

LOW TEMPERATURE COFIRED CERAMIC (LTCC); MICROFLUIDIC SYSTEM; TEMPERATURE SENSOR;

CERAMIC MATERIALS;

EID: 33645514806     PISSN: 1546542X     EISSN: 17447402     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2006.02072.x     Document Type: Article

References (22)

1. L. J. Golonka, A. Dziedzic, J. Kita, and T. Zawada, "LTCC in Microsystems Application" Informacije MIDEM 32/4 272-279 (2002).
2. L. J. Golonka, "Low Temperature Co-fired Ceramic (LTCC) Technology in Microelectronics" Proceedings of the Symposium on Processing of Electroceramics, Bled, Slovenia, 313-329, 2003.
3. J. Kita, A. Dziedzic, L. J. Golonka, and T. Zawada, "Laser Treatment of LTCC for 3D Structures and Elements" Microelectron. Int., 19 14-18 (2002).
4. M. R. Gongora-Rubio, P. Espinoza-Vallejos, L. Sola-Laguna, and J. J. Santiago-Aviles, "Overview of Low Temperature Co-Fired Ceramics Tape Technology for Meso-System Technology (MsST)" Sensors Actuat. A Phys., 89 222-241 (2001).
5. R. C. Colon, R. Furlan, E. W. Simoes, R. E. Bruzetti Leminski, M. R. Gongora-Rubio, and J. J. Santiago-Avilés, "Development of Micromolds and Application with LTCC Substrates to Obtain Microfluidic Devices" Proceedings of IMAPS Conference on Ceramic Interconnect Technology, Denver, April, 139-143, 2004.
6. H. Birol, T. Maeder, C. Jacq, and P. Ryser, "3-D Structuration of LTCC for Sensor Micro-Fluidic Applications, "Proceedings of European Microelectronics Packaging and Interconnection Symposium, Prague, June, 366-371, 2004.
7. M. Massiot and B. Roesner, "New 3D Possibilities of LTCC Technology" Proceedings of 14th European Microelectronic and Packaging Conference, Friedrichshafen, Germany, June, 25-28, 2003.
8. J. Kita, A. Dziedzic, L. J. Golonka, and A. Bochenek, "Properties of Laser Cut LTCC Heaters" Microelectron. Reliab., 40 1005-1010 (2000).
9. 2 Gas Sensor on Low Temperature Cofiring Ceramics" Sensors Actuat. B Chem., 47 100-103 (1998).
10. M. Gongora-Rubio, L. M. Solá-Laguna, P. J. Moffett, and J. J. Santiago-Avilés "The Utilisation of Low Temperature Co-Fired Ceramic (LTCC-ML) Technology for Meso-Scale EMS, a Simple Thermistor Based Flow Sensor" Sensors Actuat. A Phys., 73 215-221 (1999).
11. D. L. Wilcox, "Multilayer Ceramic Microsystems Technology - An Overview"Proceedings of the 13th European Microelectronic and Packaging Conference, Strasbourg, May, 115-117, 2001.
12. G. Wang, K. Saxena, F. Barlow, S. Ang, and A. Elshabini, "A Microjet Array Air Impingement Cooling Package Fabricated Using Low Temperature Co-Fired Ceramic" Proceedings of the IMAPS Conference on Ceramic Interconnect Technology, Denver, 77-82, 2004.
13. J. J. Santiago-Avilés, M. R. Gongora-Rubio, P. Espinoza-Vallejos, and L. Sola-Laguna, "Sensors, Actuators and Other Non-Packaging Application of LTCC Tapes" Proceedings of the IMAPS Conference on Ceramic Interconnect Technology, Denver, 7-12, 2004.
14. L. Rebenklau, K-J. Wolter, and S. Howitz, " Realization of Hybrid Microfluidic Systems Using Standard LTCC Process " Proceedings of the 50th ECTC IEEE, Las Vegas, 1696-1700, 2000.
15. P. Wasilek, L. J. Golonka, A. Gorecka-Drzazga, H. Roguszczak, and T. Zawada, "LTCC Liquid Conductivity Detector" Proceedings of the 26th International Spring Seminar on Electronics Technology, High Tatras, Slovakia, May, 202-206, 2003.
16. B. Smith, M. Pleskach, and C. Gamlen, "Microfluidics for Thermal Management: Applications, Fabrication and Demonstration in LTCC" Proceedings of the IMAPS Conference on Ceramic Interconnect Technology, Denver, 217-222, 2003.
17. M. R. Gongora-Rubio, M. Bariatto Andrade Fontes, Z. Mendes da Rocha, E. Richter, and L. Angnes, "LTCC Manifold for Heavy Metal Detection System in Biomedical and Environmental Fluids" Proceedings of the Eurosensors XVII, Portugal, 823-826, 2003.
18. L. J. Golonka, H. Roguszczak, T. Zawada, J. Radojewski, I. Grabowska, M. Chudy, A. Dybko, Z. Brzozka, and D. Stadnik, "LTCC Based Microfluidic System with Optical Detection" Sensors Actuat. B, B 11-112 396-402 (2005).
19. M. Schuenemann, K. A. Jam, V. Grosser, R. Leutenbauer, G. Bauer, W. Schafer, and H. Reichl, "MEMS Modular Packaging and Interfaces" Proceedings of the 50th Electronic Components and Technology Conference IEEE, Las Vegas, May, 681-688, 2000.
20. S. Bargiel, A. Gorecka-Drzazga, J. Dziuban, P. Prokaryn, M. Chudy, A. Dybko, and Z. Brzozka, "Nanoliter Spectrofluorimetric Detector for Flow Systems" Proceedings of the Eurosensors XVII, Portugal, 669-672, 2003.
21. M. Chudy, P. Prokaryn, A. Dybko, and Z. Brzozka, "Temperature Controlled Microfluidic PDMS Reactor" Proceedings of the 7th International Conference on Miniaturized Chemical and Biochemical Analysis Systems, Squaw Valley, 171-174, 2003.
22. T. Zawada, K. Malecha, L. J. Golonka, J. Radojewski, H. Roguszczak, and M. Stefanow, "Integration of Light Detection in LTCC Fluidic Microsystems" Proceedings of the 15th European Microelectronic and Packaging Conference, Brugge, Belgium, 582-587, 2005.