FE modeling of capacitive pressure sensors realized in LTCC technology

ISSE 2010 - 33rd International Spring Seminar on Electronics Technology: Polymer Electronics and Nanotechnologies: Towards System Integration - Conference Proceedings

Volumn , Issue , 2010, Pages 350-353

  Marghescu, Cristina ^a   Ionescu, Ciprian ^a   Svasta, Paul ^a   Zarnik, Marina Santo ^b   Belavič, Darko ^b  

^a UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

^b HIPOT   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE PRESSURE SENSORS; ELECTRICAL CAPACITANCE; FE MODELING; FINITE ELEMENT ANALYSIS; HARSH ENVIRONMENT; LIQUID MEDIA; LTCC (LOW TEMPERATURE CO-FIRED CERAMIC); LTCC TECHNOLOGY; MATERIAL PROPERTY; MECHANICAL PRESSURE; MULTI-FIELD ANALYSIS; OUTPUT SIGNAL; SILICON-BASED SENSORS;

CERAMIC MATERIALS; FUNCTIONALLY GRADED MATERIALS; NANOTECHNOLOGY; PARTIAL PRESSURE SENSORS; PRESSURE SENSORS; TECHNICAL PRESENTATIONS;

FINITE ELEMENT METHOD;

EID: 77956951923     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSE.2010.5547320     Document Type: Conference Paper

References (5)

1. Thelemann, H. Thust, M. Hintz, "Using LTCC for microsystems", Microelectronics International, Vol. 19, No. 3, pp. 19-23, 2002.
2. Beeby, S., G. Ensell, M. Kraft, N. White, MEMS Mechanical Sensors, Artech House, 2004, Cap.6.
3. D. Belavič, M. Santo Zarnik, S. Maček, M. Jerlah, M. Hrovat, M. Pavlin, "Capacitive pressure sensors realized with LTCC technology", Proceedings of the 31st International Spring Seminar on Electronics Technology (ISSE 2008), Reliability and life-time prediction, Piscataway: IEEE, Budapest, Hungary, 7- 11 Mai, 2008. pp. 271-274.
4. C. Ionescu, P. Svasta, C.Marghescu, M. Santo Zarnik, and D. Belavič, "Study on optimization of capacitive pressure sensorusing coupled mechanical-electric analysis", ISSE 2009 Proceedings, Brno, Czech Republic, May 13-17, 2009.
5. C. Ionescu, P. Svasta, C.Marghescu, M. Santo Zarnik, and D. Belavič, "The Design and Improvement of LTCC-based Capacitive Pressure Sensors Employing Finite Element Analysis", EMPC 2009 Proceedings, Rimini, Italy, June 15-18 2009.