Capacitive pressure sensors realized with LTCC technology

2008 31st International Spring Seminar on Electronics Technology: Reliability and Life-time Prediction, ISSE 2008

Volumn , Issue , 2008, Pages 269-272

  Belavič, Darko ^a   Zarnik, Marina Santo ^a   Maček, Srečko ^b   Jerlah, Mitja ^a   Hrovat, Marko ^b   Pavlin, Marko ^a  

^a doo   (Slovenia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE VALUES; CAPACITIVE PRESSURE SENSORS; CERAMIC PRESSURE SENSORS; CONDITIONING CIRCUIT; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC TECHNOLOGY; OUTPUT FREQUENCY; RIGID RINGS; RIGID SUBSTRATES; THICK-FILM ELECTRODES;

CAPACITANCE; CERAMIC MATERIALS; DIAPHRAGMS; ELECTROCHEMICAL ELECTRODES; PARTIAL PRESSURE SENSORS; PRESSURE SENSORS; PRESSURE TRANSDUCERS;

CERAMIC CAPACITORS;

EID: 71249140295     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSE.2008.5276589     Document Type: Conference Paper

References (13)

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