Design study for a capacitive ceramic pressure sensor

Microelectronics International

Volumn 28, Issue 3, 2011, Pages 31-35

  Zarnik, Marina Santo ^a,b   Belavic, Darko ^a,b   MacEk, Srecko ^a  

^a HIPOT RR   (Slovenia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

3D LTCC structure; Capacitive pressure sensor; Capacitive to digital conversion; Electrodes; Sensors

Indexed keywords

AIR-GAPS; CAPACITIVE PRESSURE SENSORS; CAPACITIVE SENSING; CAPACITIVE SENSOR; CERAMIC PRESSURE SENSORS; COFIRED; DESIGN STUDIES; DESIGN/METHODOLOGY/APPROACH; GUARD-RINGS; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC SUBSTRATES; OPTIMISATIONS; PARASITIC ELEMENT; PRESSURE RANGES; READOUT ELECTRONICS; SENSOR APPLICATIONS; TEMPERATURE COEFFICIENT; THICK-FILM ELECTRODES;

ELECTRODES; PARTIAL PRESSURE SENSORS; PRESSURE SENSORS; SENSORS; THREE DIMENSIONAL;

DESIGN;

EID: 84856639326     PISSN: 13565362     EISSN: None     Source Type: Journal    
DOI: 10.1108/13565361111162602     Document Type: Article

References (7)

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