An LTCC-Based capacitive pressure sensor with a digital output

Informacije MIDEM

Volumn 40, Issue 1, 2010, Pages 74-81

  Zarnik, Marina Santo ^a   Možek, Matej ^b   Maček, Srečko ^c   Belavič, Darko ^a  

^a HIPOT RR doo   (Slovenia)

^b UNIVERSITY OF LJUBLJANA   (Slovenia)

^c JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

3 D LTCC structure; Capacitive sensing; Capacitive to digital conversion; Low power consumption; Pressure sensor

Indexed keywords

EID: 77955117316     PISSN: 03529045     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)

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