Feasibility study of a thick-film PZT resonant pressure sensor made on a prefired 3D LTCC structure

International Journal of Applied Ceramic Technology

Volumn 6, Issue 1, 2009, Pages 9-17

  Zarnik, Marina Santo ^a   Belavič, Darko ^a   Maček, Srečko ^b   Holc, Janez ^b  

^a HIPOT   (Slovenia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PLANNING; PRESSURE SENSORS; PRESSURE TRANSDUCERS; RESOURCE ALLOCATION; SEMICONDUCTING LEAD COMPOUNDS; THICK FILMS;

EXPERIMENTAL ANALYSES; FEASIBILITY STUDIES; FINITE-ELEMENT ANALYSES; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC STRUCTURES; MATERIAL PROPERTIES; RESONANT PRESSURE SENSORS; ZIRCONATE;

SENSORS;

EID: 58149485447     PISSN: 1546542X     EISSN: 17447402     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2008.02322.x     Document Type: Article

References (14)

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