The warm-up and offset stability of a low-pressure piezoresistive ceramic pressure sensor

Sensors and Actuators, A: Physical

Volumn 158, Issue 2, 2010, Pages 198-206

  Zarnik, Marina Santo ^a,b   Belavic, Darko ^a   Macek, Srecko ^b  

^a HIPOT R and D   (Slovenia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Finite element analysis; LTCC; Offset stability; Thick film piezoresistive sensor; Warm up drift

Indexed keywords

CERAMIC PRESSURE SENSORS; DESIGN PARAMETERS; EXPERIMENTAL TEST; FINITE-ELEMENT ANALYSIS; HIGHER RESOLUTION; LIQUID PRESSURE; LOW PRESSURES; LOW YOUNG'S MODULUS; LOW-TEMPERATURE CO-FIRED CERAMIC MATERIALS; MECHANICAL STRENGTH; MINIATURISATION; OFFSET VOLTAGE; PIEZO-RESISTIVE; PIEZORESISTIVE SENSORS; PRESSURE RANGES; PROCESSING PARAMETERS; SENSOR CHARACTERISTICS; THIN SHEET; THREE-DIMENSIONAL STRUCTURE;

CERAMIC MATERIALS; PARTIAL PRESSURE SENSORS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; STABILITY;

FINITE ELEMENT METHOD;

EID: 77949340360     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.12.035     Document Type: Article

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