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Volumn , Issue , 2009, Pages
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The design and improvement of LTCC-based capacitive pressure sensors employing finite element analysis
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Author keywords
Capacitive pressure sensor; Ceramic pressure sensor; Finite element modeling; LTCC
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Indexed keywords
ANSYS MODEL;
APPLIED PRESSURE;
CAPACITIVE PRESSURE SENSORS;
CAPACITIVE SENSOR;
CERAMIC PRESSURE SENSORS;
CONDITIONING CIRCUIT;
CYLINDRICAL CHAMBERS;
DU PONT;
FINITE ELEMENT ANALYSIS;
FINITE ELEMENT MODELING;
FINITE ELEMENT MODELS;
LIQUID LEVEL;
PHYSICAL QUANTITIES;
SENSOR MARKETS;
SENSOR MATERIALS;
TECHNOLOGY COSTS;
VIRTUAL MODELS;
CERAMIC MATERIALS;
CHIP SCALE PACKAGES;
ELECTRODES;
MICROELECTRONICS;
PARTIAL PRESSURE SENSORS;
PRESSURE SENSORS;
PRESSURE TRANSDUCERS;
FINITE ELEMENT METHOD;
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EID: 70449863778
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (6)
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References (6)
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