An analytical capacitance model of temperature-sensitive, large-displacement multimorph cantilevers: Numerical and experimental validation

Journal of Microelectromechanical Systems

Volumn 21, Issue 1, 2012, Pages 161-170

  Scott, Sean ^a   Kim, Jeong Il ^b   Sadeghi, Farshid ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

^b QUALCOMM INC   (United States)

Author keywords

Analytical; cantilever; capacitor; microelectromechanical systems (MEMS); model; multimorph

Indexed keywords

ANALYTICAL; ANALYTICAL CAPACITANCE MODEL; AVERAGE DEVIATION; AVERAGE ERRORS; CANTILEVER; EXPERIMENTAL VALIDATIONS; MACRO MODEL; MAXIMUM ERROR; MICROELECTROMECHANICAL SYSTEMS (MEMS); MULTIMORPH; POST-FABRICATION; ROOM TEMPERATURE; STANDARD DEVIATION; TEMPERATURE-SENSITIVE;

CAPACITANCE; CAPACITANCE MEASUREMENT; CAPACITORS; ELECTRIC FIELDS; ELECTROMECHANICAL DEVICES; MECHATRONICS; MEMS; MICROMECHANICS; MODELS; NANOCANTILEVERS; PIEZOELECTRIC ACTUATORS; SILICON COMPOUNDS; SILICON OXIDES; SILICON WAFERS;

FINITE ELEMENT METHOD;

EID: 84858446679     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2171323     Document Type: Article

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