Micro fabrication of cyclic olefin copolymer (COC) based microfluidic devices

Microsystem Technologies

Volumn 18, Issue 2, 2012, Pages 159-166

  Jena, Rajeeb K ^a,b   Yue, C Y ^a,b   Lam, Y C ^a,b  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CONFOCAL MICROSCOPES; CYCLIC OLEFIN COPOLYMERS; DEMOLDING; HOLDING TIME; HOT EMBOSSING TECHNIQUE; HOT-EMBOSSING; KEY PROCESS; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-FLUIDIC DEVICES; PARAMETRIC STUDY; PROCESS PARAMETERS; SCANNING ELECTRON MICROSCOPE; THERMAL BONDING;

COPOLYMERS; MICROELECTROMECHANICAL DEVICES; OLEFINS; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY;

FLUIDIC DEVICES;

EID: 84857362888     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1366-z     Document Type: Conference Paper

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