Optical heating for short hot embossing cycle times

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 859-863

  Seunarine, K ^a   Gadegaard, N ^a   Riehle, M O ^a   Wilkinson, C D W ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

Cell engineering; Hot embossing; Nano imprint; Optical coupling; Polymer

Indexed keywords

BIODEGRADATION; CELL CULTURE; COOLING; OPTICAL PROPERTIES; POLYMERS;

CELL ENGINEERING; HOT EMBOSSING; NANO-IMPRINT; OPTICAL COUPLING;

HEATING;

EID: 33646054264     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.12.026     Document Type: Article

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