Replication techniques for diffractive optical elements

Microelectronic Engineering

Volumn 34, Issue 3-4, 1997, Pages 321-339

  Gale, M T ^a  

^a CSEM   (Switzerland)

Author keywords

Diffractive optical elements; Micro optics; Microfabrication; Replication

Indexed keywords

DIFFRACTION GRATINGS; ETCHING; HOLOGRAMS; NANOSTRUCTURED MATERIALS; OPTICS; THIN FILMS;

DIFFRACTIVE OPTICAL ELEMENTS (DOE); REPLICATION TECHNIQUES;

MICROELECTRONIC PROCESSING;

EID: 0031348356     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(97)00189-5     Document Type: Article

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