Ion beam nanoscale fabrication and lithography - A review

Applied Surface Science

Volumn 258, Issue 9, 2012, Pages 4103-4111

  Baglin, J E E ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

Focused ion beam; Ion implantation; ITRS Roadmap; Lithography; Nanofabrication; Self assembly

Indexed keywords

FABRICATION; FOCUSED ION BEAMS; ION IMPLANTATION; IONS; LITHOGRAPHY; NANOTECHNOLOGY; SELF ASSEMBLY;

COMPLEX IONS; DIRECTED SELF-ASSEMBLY; NANO-SCALE FABRICATION; RECENT RESEARCHES; ROADMAP;

ION BEAMS;

EID: 84857060372     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.11.074     Document Type: Conference Paper

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