Ion projection direct structuring for patterning of magnetic media

IEEE Transactions on Magnetics

Volumn 38, Issue 5 I, 2002, Pages 1952-1954

  Dietzel, Andreas ^a   Berger, Rüdiger ^a   Grimm, Hubert ^a   Bruenger, Wilhelm H ^b   Dzionk, Christian ^b   Letzkus, Florian ^c   Springer, Reinhard ^c   Loeschner, Hans ^d   Platzgummer, Elmar ^d   Stengl, Gerhard ^d   Bandić, Zvonimir Z ^e   Terris, Bruce D ^e  

^a IBM   (Germany)

^b FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

^c Institut fur Mikroelektronik Stuttgart   (Germany)

^d IMS NANOFABRICATION AG   (Austria)

^e IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

Co Pt multilayers; Ion projection structuring; Patterned magnetic storage media; Stencil masks

Indexed keywords

COBALT ALLOYS; LITHOGRAPHY; MAGNETIC ANISOTROPY; MASKS; MULTILAYERS; SILICON;

PATTERNED STORAGE MEDIA;

MAGNETIC STORAGE;

EID: 0036762293     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2002.802846     Document Type: Article

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