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Volumn 21, Issue 17, 2010, Pages

Monte Carlo simulation of focused helium ion beam induced deposition

(3) Smith, Daryl A a Joy, David C a Rack, Philip D a

a University of Tennessee Knoxville (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ION BEAMS; IONS; REACTION RATES;

ELECTRON BEAM-INDUCED DEPOSITION; GROWTH REGIME; HELIUM ION BEAMS; PRIMARY IONS; SECONDARY ELECTRONS; VERTICAL GROWTH;

MONTE CARLO METHODS;

EID: 77958544542 PISSN: 09574484 EISSN: 13616528 Source Type: Journal
DOI: 10.1088/0957-4484/21/17/175302 Document Type: Article

Times cited : (48)

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