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Journal of Applied Physics

Volumn 109, Issue 4, 2011, Pages

Topography evolution mechanism on fused silica during low-energy ion beam sputtering

(4) Vollner J a Ziberi, B a Frost, F a Rauschenbach, B a

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC SURFACES; EVOLUTION MECHANISM; ION BEAM EROSION; ION INCIDENCE ANGLE; LOW ENERGY ION BEAM; LOW-ENERGY ION BEAM EROSION; SILICA SURFACE;

BEAM PLASMA INTERACTIONS; EROSION; ION BEAMS; ION BOMBARDMENT; IONS; SILICA; SPUTTERING; SURFACE TOPOGRAPHY; TOPOGRAPHY;

FUSED SILICA;

EID: 79952152611 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3549170 Document Type: Article

Times cited : (37)

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