The molecular dynamics simulation of ion-induced ripple growth

Journal of Chemical Physics

Volumn 131, Issue 20, 2009, Pages

  Sule P ^a   Heinig, K H ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EXPERIMENTAL DATA; HEIGHT FUNCTIONS; ION EROSION; ION IMPACT; ION SPUTTERING; LONG-WAVELENGTH LIMITS; MD SIMULATION; MOLECULAR DYNAMICS SIMULATIONS; NANOPATTERNING; RIPPLE WAVELENGTH; SHORT WAVELENGTHS; SIMULATION RESULT; SINUSOIDAL SURFACE PROFILES; SURFACE GROWTH; TIME EVOLUTIONS; WAVY SURFACE;

ION BOMBARDMENT; MOLECULAR DYNAMICS; SILICON;

IONS;

EID: 71549124709     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3264887     Document Type: Article

References (44)

1. J. Li, D. Stein, C. McMullan, D. Branton, M. J. Aziz, and J. A. Golovchenko, Nature (London) 0028-0836 412, 166 (2001). 10.1038/35084037 (Pubitemid 32674708)
2. S. Facsko, T. Dekorsy, C. Koerdt, C. Trappe, H. Kurz, A. Vogt, and H. L. Hartnagel, Science 0036-8075 285, 1551 (1999). 10.1126/science.285.5433.1551 (Pubitemid 29420576)
3. U. Valbusa, C. Boragno, and F. Buatier de Mongeot, J. Phys.: Condens. Matter 0953-8984 14, 8153 (2002). 10.1088/0953-8984/14/35/301
4. M. A. Makeev, R. Cuerno, and A. L. Barabasi, Nucl. Instrum. Methods Phys. Res. B 0168-583X 197, 185 (2002). 10.1016/S0168-583X(02)01436-2 (Pubitemid 35432941)
5. W. L. Chan and E. Chason, J. Appl. Phys. 0021-8979 101, 121301 (2007). 10.1063/1.2749198 (Pubitemid 47141263)
6. J. Erlebacher, M. J. Aziz, E. Chason, M. B. Sinclair, and J. A. Floro, Phys. Rev. Lett. 0031-9007 82, 2330 (1999)
7. B. Ziberi, F. Frost, Th. Höche, and B. Rauschenbach, Phys. Rev. B 0163-1829 72, 235310 (2005)
8. B. Ziberi, F. Frost, M. Tartz, H. Neumann, and B. Rauschenbach, Appl. Phys. Lett. 0003-6951 92, 063102 (2008). 10.1063/1.2841641 (Pubitemid 351263844)
9. A. Keller, R. Cuerno, S. Facsko, and W. Möller, Phys. Rev. B 0163-1829 79, 115437 (2009). 10.1103/PhysRevB.79.115437
10. M. Stepanova and S. K. Dew, Appl. Phys. Lett. 0003-6951 84, 1374 (2004). 10.1063/1.1650546
11. E. O. Yewande, R. Kree, and A. Hartmann, Phys. Rev. B 0163-1829 75, 155325 (2007). 10.1103/PhysRevB.75.155325
12. M. Strobel, K. -H. Heinig, and T. Michely, Surf. Sci. 0039-6028 486, 136 (2001). 10.1016/S0039-6028(01)01016-0 (Pubitemid 32536621)
13. M. C. Moore, N. Kalyanasundaram, J. B. Freund, and H. T. Johnson, Nucl. Instrum. Methods Phys. Res. B 0168-583X 225, 241 (2004). 10.1016/j.nimb.2004.04. 175
14. M. Moseler, P. Gumbsch, C. Casiraghi, A. C. Ferrari, and J. Robertson, Science 0036-8075 309, 1545 (2005). 10.1126/science.1114577 (Pubitemid 41266477)
15. N. Kalyanasundaram, M. Ghazisaeidi, J. B. Freund, and H. T. Johnson, Appl. Phys. Lett. 0003-6951 92, 131909 (2008). 10.1063/1.2905297
16. P. Süle, M. Menyhárd, and K. Nordlund, Nucl. Instrum. Methods Phys. Res. B 0168-583X 222, 525 (2004)
17. P. Süle, Surf. Sci. 0039-6028 585, 170 (2005). 10.1016/j.susc.2005. 04.025 (Pubitemid 40786399)
18. M. A. Karolewski, Nucl. Instrum. Methods Phys. Res. 0167-5087 243, 6 (2006). 10.1016/j.nimb.2005.07.194
19. B. J. Thijsse, T. P. C. Klaver, and E. F. C. Haddeman, Appl. Surf. Sci. 0169-4332 231-232, 29 (2004). 10.1016/j.apsusc.2004.03.207
20. A. Pimpinelli, J, Villain, Physics of Crystal Growth (Cambridge University Press, Cambridge, 1998).
21. W. W. Mullins, J. Appl. Phys. 0021-8979 28, 333 (1957)
22. W. W. Mullins, J. Appl. Phys. 0021-8979 30, 77 (1959). 10.1063/1.1734979
23. K. Nordlund, Comput. Mater. Sci. 0927-0256 3, 448 (1995)
24. Q; K. Nordlund, M. Ghaly, R. S. Averback, M. Caturla, T. Diaz de la Rubia, J. Tarus
25. P. Süle, M. Menyhárd, L. Kótis, J. Lábár, and W. F. Egelhoff, Jr., J. Appl. Phys. 0021-8979 101, 043502 (2007). 10.1063/1.2437661 (Pubitemid 46362907)
26. M. P. Allen and D. J. Tildesley, Computer Simulation of Liquids (Oxford Science, Oxford, 1989).
27. P. Süle and M. Menyhárd, Phys. Rev. B 0163-1829 71, 113413 (2005). 10.1103/PhysRevB.71.113413 (Pubitemid 40771176)
28. J. Tersoff, Phys. Rev. B 0163-1829 37, 6991 (1988). 10.1103/PhysRevB.37. 6991
29. K. M. Beardmore and N. Grönbech-Jensen, Phys. Rev. B 0163-1829 60, 12610 (1999). 10.1103/PhysRevB.60.12610
30. J. Samela, K. Nordlund, J. Keinonen, and V. N. Popok, Nucl. Instrum. Method Phys. Res. B 255, 253 (2007). 10.1016/j.nimb.2006.11.080 (Pubitemid 46241581)
31. M. J. Frisch, G. W. Trucks, H. B. Schlegel, Gaussian, Inc., Pittsburgh, PA, (2003); See also at: http://www.gaussian.com.
32. P. Süle, J. Chem. Phys. 0021-9606 129, 084707 (2008). 10.1063/1.2969082
33. W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer, New York, 1991).
34. H. J. C. Berendsen, J. P. M. Postma, W. F. van Gunsteren, and J. R. Haak, J. Chem. Phys. 0021-9606 81, 3684 (1984). 10.1063/1.448118
35. P. Süle, M. Menyhárd, and K. Nordlund, Nucl Instrum. Method Phys. Res. B 226, 517 (2004); P. Süle, M. Menyhárd, and K. Nordlund, Nucl Instrum. Method Phys. Res. B B211, 524 (2003).
36. S. Facsko, personal communication (2008).
37. E. Chason, W. L. Chan, and M. S. Bharathi, Phys. Rev. B 0163-1829 74, 224103 (2006). 10.1103/PhysRevB.74.224103 (Pubitemid 44907456)
38. M. A. Makeev and A. -L. Barabási, Nucl. Instrum. Method Phys. Res. B 222, 335 (2004). 10.1016/j.nimb.2004.02.028
39. A. Barna, M. Menyhard, L. Kotis, G. J. Kovacs, G. Radnoczi, A. Zalar, and P. Panjan, J. Appl. Phys. 0021-8979 98, 024901 (2005). 10.1063/1.1968444 (Pubitemid 41144593)
40. H. Gnaser, Solid-State Physics (Springer, New York, 1999).
41. C. Battaglia, K. Gaál-Nagy, C. Monney, C. Didiot, E. F. Schwier, Phys. Rev. Lett. 0031-9007 102, 066102 (2009)
42. F. Bechstedt, Principles of Surface Physics (Springer, New York, 2003).
43. P. K. Giri, V. Raineri, G. Franzo, and E. Rimini, Phys. Rev. B 0163-1829 65, 012110 (2001). 10.1103/PhysRevB.65.012110
44. S. Park, B. Kahng, H. Jeong, and A. -L. Barabási, Phys. Rev. Lett. 0031-9007 83, 3486 (1999). 10.1103/PhysRevLett.83.3486