Enhancement of crystallinity and optical properties of bilayer TiO 2/ZnO thin films prepared by atomic layer deposition

Journal of Nanoscience and Nanotechnology

Volumn 11, Issue 9, 2011, Pages 8143-8147

  Hussin, Rosniza ^a,b   Choy, Kwang Leong ^a   Hou, Xianghui ^a  

^a UNIVERSITY OF NOTTINGHAM   (United Kingdom)

^b UNIVERSITI TUN HUSSEIN ONN MALAYSIA   (Malaysia)

Author keywords

Atomic layer deposition; Bilayer; Optical properties; Thin films; Titanium oxide; Zinc oxide

Indexed keywords

ANATASE STRUCTURES; BI-LAYER; CHEMICAL VAPOUR DEPOSITION; CRYSTALLINITIES; DEPOSITION CYCLES; MULTI-LAYER THIN FILM; MULTILAYER STRUCTURES; OPTICAL PROPERTIES OF MATERIALS; SI SUBSTRATES; SINGLE LAYER; TIO; UV LUMINESCENCE; UV-VIS SPECTROSCOPY; XRD; ZNO; ZNO FILMS;

ATOMIC FORCE MICROSCOPY; ATOMIC LAYER DEPOSITION; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; FILM PREPARATION; METALLIC FILMS; MULTILAYERS; OPTICAL FILMS; OPTICAL PROPERTIES; OXIDE FILMS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TITANIUM; TITANIUM OXIDES; ULTRAVIOLET SPECTROSCOPY; ULTRAVIOLET VISIBLE SPECTROSCOPY; X RAY DIFFRACTION; ZINC OXIDE;

TITANIUM DIOXIDE;

EID: 84856869055     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2011.5086     Document Type: Conference Paper

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