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Volumn 23, Issue 2-4, 2009, Pages 361-366

Electrical, optical, and structural properties of ITO co-sputtered IZO films by dual target magnetron sputtering

(8) Jeong, Jin A a Choi, Kwang Hyuk a Bae, Jung Hyeok a Moon, Jong Min a Jeong, Soon Wook a Kim, Insoo a Kim, Han Ki a Yi, Min Su b

a Kumoh National Institute of Technology (South Korea)

b Kyungpook National University (South Korea)

Author keywords

Co sputtered IZO; DC magnetron sputter; ITO; IZTO; Work function

Indexed keywords

CO-SPUTTERED IZO; DC MAGNETRON SPUTTER; DC POWER; DIRECT CURRENT MAGNETRON SPUTTERING; INDIUM TIN OXIDE; INDIUM-ZINC-OXIDE FILMS; ITO FILMS; LOW-TRANSITION TEMPERATURE; MAGNETRON SPUTTER; ROOM TEMPERATURE; SCANNING ELECTRON MICROSCOPE; SYNCHROTRON X-RAY SCATTERING; TARGET MAGNETRON;

AMORPHOUS FILMS; ELECTRIC POWER MEASUREMENT; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; MAGNETRON SPUTTERING; MAGNETRONS; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; TARGETS; TIN; TITANIUM COMPOUNDS; WORK FUNCTION; ZINC; ZINC OXIDE;

INDIUM;

EID: 73449096807 PISSN: 13853449 EISSN: 15738663 Source Type: Journal
DOI: 10.1007/s10832-008-9468-4 Document Type: Article

Times cited : (9)

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