A conduction-convection model for self-heating in piezoresistive microcantilever biosensors

Sensors and Actuators, A: Physical

Volumn 175, Issue , 2012, Pages 19-27

  Ansari, Mohd Zahid ^a   Cho, Chongdu ^a  

^a Inha University   (South Korea)

Author keywords

Conduction; Convection; Piezoresistive microcantilever; Self heating; Sensitivity; Thermal drifting

Indexed keywords

ANALYTICAL RESULTS; COMPARISON RESULT; CONVECTIVE HEAT TRANSFER COEFFICIENT; GOLD-COATED; MICRO-CANTILEVERS; MICROCANTILEVER BIOSENSORS; NUMERICAL RESULTS; PIEZO-RESISTIVE; PIEZORESISTOR; RESISTANCE CHANGE; SELF-HEATING; SENSITIVITY; SURFACE STRESS; TEMPERATURE PROFILES; THERMAL DRIFTING; U-SHAPED;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; HEAT CONDUCTION; HEAT CONVECTION; HEAT TRANSFER COEFFICIENTS; HEATING; PHOSPHORUS; SILICA; TEMPERATURE CONTROL;

BIOSENSORS;

EID: 84856731003     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.12.014     Document Type: Article

References (26)

1. P.I. Oden, P.G. Datskos, T. Thundat, and R.J. Warmack Uncooled thermal imaging using a piezoresistive microcantilever Appl. Phys. Lett. 69 1996 3277 3279 (Pubitemid 126605880)
2. Z. Fan, J. Chen, J. Zou, D. Bullen, C. Liu, and F. Delcomyn Design and fabrication of artificial lateral-line flow sensors J. Micromech. Microeng. 12 2002 655 661
3. N. Abedinov, P. Grabiec, T. Gotszalk, T. Ivanov, J. Voigt, and I.W. Rangelow Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection J. Vacuum Sci. Technol. A: Vacuum, Surf. Films 19 2001 2884
4. R.L. Gunter, W.G. Delinger, K. Manygoats, A. Kooser, and T.L. Porter Viral detection using an embedded piezoresistive microcantilever sensor Sens. Actuators A: Phys. 107 2003 219 224
5. L.A. Pinnaduwage, A. Gehl, D.L. Hedden, G. Muralidharan, T. Thundat, R.T. Lareau, T. Sulchek, L. Manning, B. Rogers, M. Jones, and J.D. Adams Explosives: a microsensor for trinitrotoluene vapour Nature 425 2003 474
6. J.C. Doll, S-J Park, and B.L. Pruitt Design optimization of piezoresistive cantilevers for force sensing in air and water J. Appl. Phys. 106 2009 064310
7. Y. Zhou, Z. Wang, C. Wang, W. Ruan, and L. Liu Design, fabrication and characterization of a two-step released silicon dioxide piezoresistive microcantilever immunosensor J. Micromech. Microeng. 19 2009 065026
8. K. Noda, K. Hoshino, K. Matsumoto, and I. Shimoyama A shear stress sensor for tactile sensing with the piezoresistive cantilever standing in elastic material Sens. Actuators A: Phys. 127 2006 295 301
9. M. Tortonese, R. Barrett, and C. Quate Atomic resolution with an atomic force microscope using piezoresistive detection Appl. Phys. Lett. 62 1993 834 836
10. R. Mukhopadhyay, M. Lorentzen, J. Kjems, and F. Besenbacher Nanomechanical sensing of DNA sequences using piezoresistive cantilevers Langmuir 21 2005 8400 8408 (Pubitemid 41321817)
11. J. Thaysen, A. Boisen, O. Hansen, and S. Bouwstra Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement Sens. Actuators 83 2000 47 53
12. B.W. Chui, T.D. Stowe, Y.S. Ju, K.E. Goodson, T.W. Kenny, H.J. Mamin, B.D. Terris, and R.P. Ried Low-stiffness silicon cantilever with integrated heaters and piezoresistive sensors for high density AFM thermomechanical data storage J. Microelectromech. Syst. 7 1998 69
13. G. Binnig, M. Despont, U. Drechsler, W. Haberle, M. Lutwyche, P. Vettiger, H.J. Mamin, W.B. Chui, and T.W. Kenny Ultrahigh-density atomic force microscopy data storage with erase capability Appl. Phys. Lett. 74 1999 1329
14. W.P. King Design analysis of heated atomic force microscope cantilevers for nanotopography measurements J. Micromech. Microeng. 15 2005 2441
15. W.P. King, T.W. Kenny, and K.E. Goodson Comparison of thermal and piezoresistive sensing approaches for atomic force microscopy topography measurements Appl. Phys. Lett. 85 2004 2086
16. N. Privorotskaya, Y.-S. Liu, J. Lee, H. Zeng, J.A. Carlisle, A. Radadia, L. Millet, R. Bashir, and W.P. King Rapid thermal lysis of cells using silicon-diamond microcantilever heaters Lab Chip 10 2010 1135 1141
17. A. Choudhury, P.J. Hesketh, Z. Hu, and T. Thundat Thermal characterization and temperature control of piezoresistive microcantilevers Proceedings of the 5th IEEE Sensors Conference Daegu, Korea, 22-25 October 2006
18. S.M. Yang, T.I. Yin, and Design Analysis of piezoresistive microcantilever for surface stress measurement in biochemical sensor Sens. Actuators B: Chem. 120 2007 736 744 (Pubitemid 44959839)
19. M.Z. Ansari, and C.D. Cho An analytical model of joule heating in piezoresistive microcantilevers Sensors 10 2010 9668 9686
20. A. Loui, S. Elhadj, D.J. Sirbuly, S.K. McCall, B.R. Hart, and T.V. Ratto An analytical model of thermal drift in piezoresistive microcantilever sensors J. Appl. Phys. 107 2010 054508
21. M. Kaviany Principles of Heat Transfer 2002 Wiley-Interscience New York, USA
22. W.M. Bullis, F.H. Brewer, C.D. Kolstad, and L.J. Swartzendruber Temperature coefficient of resistivity of silicon and germanium near room temperature Solid-State Electron. 11 1968 639 646
23. Y. Kanda A graphical representation of the piezoresistance coefficients in silicon IEEE Trans. Electron. Devices 29 1982 64 70 (Pubitemid 12474034)
24. N.L. Privorotskaya, and W.P. King Silicon microcantilever hotplates with high temperature uniformity Sens. Actuators A: Phys. 152 2009 160 167
25. J. Lee, and W.P. King Microcantilever hotplates: design, fabrication, and characterization Sens. Actuators A: Phys. 136 2007 291 298 (Pubitemid 46590662)
26. Y. Arntz, J.D. Seelig, H.P. Lang, J. Zhang, P. Hunziker, J.P. Ramseyer, E. Meyer, M. Hegner, and C. Gerber Label-free protein assay based on a nanomechanical cantilever array Nanotechnology 14 2003 86 90