메뉴 건너뛰기




Volumn , Issue , 2006, Pages 1223-1226

Thermal characterization and temperature control of piezoresistive microcantilevers

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSING; DETECTION LIMITS; HEAT TRANSFER CO-EFFICIENT; MICRO-CANTILEVERS; PIEZORESISTIVE; TEMPERATURE CONTROLLING;

EID: 50149106112     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355848     Document Type: Conference Paper
Times cited : (7)

References (11)
  • 1
    • 34547239174 scopus 로고
    • Thermal and ambient -induced deflections of scanning force microscope cantilevers
    • T. Thundat, R. J. Warmack, G. Y. Chen, and D. P. Allison, "Thermal and ambient -induced deflections of scanning force microscope cantilevers," Applied Physics Letters, vol. 64, pp. 2894-2903, 1994.
    • (1994) Applied Physics Letters , vol.64 , pp. 2894-2903
    • Thundat, T.1    Warmack, R.J.2    Chen, G.Y.3    Allison, D.P.4
  • 2
    • 0028138356 scopus 로고
    • Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device
    • J. R. Barnes, R. J. Stephenson, M. E. Welland, C. Gerber, and J. K. Gimzewski, "Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device," Nature, vol. 372, pp. 79, 1994.
    • (1994) Nature , vol.372 , pp. 79
    • Barnes, J.R.1    Stephenson, R.J.2    Welland, M.E.3    Gerber, C.4    Gimzewski, J.K.5
  • 3
    • 0000419469 scopus 로고
    • Micromechanical sensors for chemical and physical measurements
    • E. A. Wachter and T. Thundat, "Micromechanical sensors for chemical and physical measurements," Review of Scientific Instruments, vol. 66, pp. 3662-7, 1995.
    • (1995) Review of Scientific Instruments , vol.66 , pp. 3662-3667
    • Wachter, E.A.1    Thundat, T.2
  • 4
    • 33645713144 scopus 로고    scopus 로고
    • Cantilever for boi-chemical sensing integrated in a microhandling system
    • Orsteds: University of Denmark
    • J. Thaysen, "Cantilever for boi-chemical sensing integrated in a microhandling system," in Mikroelektronik Centret. Orsteds: University of Denmark, 2001.
    • (2001) Mikroelektronik Centret
    • Thaysen, J.1
  • 5
    • 0033554758 scopus 로고    scopus 로고
    • Detection of 2-mercaptoethanol using gold-coated micromachined cantilevers
    • P. Datkos and I. Sauers, "Detection of 2-mercaptoethanol using gold-coated micromachined cantilevers," Sensors and Acutators B, vol. 61, pp. 75-82, 1999.
    • (1999) Sensors and Acutators B , vol.61 , pp. 75-82
    • Datkos, P.1    Sauers, I.2
  • 6
    • 29744460752 scopus 로고    scopus 로고
    • Investigation of the natural convection boundary condition in microfabricated structures
    • presented at, San Francisco, CA
    • X. Hu, A. Jain, and K. E. Goodson, "Investigation of the natural convection boundary condition in microfabricated structures," presented at ASME Summer Heat Transfer Conference, San Francisco, CA, 2005.
    • (2005) ASME Summer Heat Transfer Conference
    • Hu, X.1    Jain, A.2    Goodson, K.E.3
  • 7
    • 50149102607 scopus 로고    scopus 로고
    • Frequency-dependent electrical and thermal reponse of heated atomic force microscope cantilevers
    • K. Park, J. Lee, Z. M. Zhang, and W. P. King, "Frequency-dependent electrical and thermal reponse of heated atomic force microscope cantilevers," Journal of Microelectromechanical Systems, 2006.
    • (2006) Journal of Microelectromechanical Systems
    • Park, K.1    Lee, J.2    Zhang, Z.M.3    King, W.P.4
  • 9
    • 0141746036 scopus 로고    scopus 로고
    • Size effect on microscale single-phase flow and heat transfer
    • Z. Y. Guo and Z. X.Li, "Size effect on microscale single-phase flow and heat transfer," International Journal of Heat and Mass Transfer, vol. 46, pp. 149-159, 2003.
    • (2003) International Journal of Heat and Mass Transfer , vol.46 , pp. 149-159
    • Guo, Z.Y.1    Li, Z.X.2
  • 10
    • 48349086170 scopus 로고    scopus 로고
    • Design and fabrication of a piezoresistive microcantilever array
    • presented at, Los Angeles, CA
    • A. Choudhury, P. J. Hesketh, Z. Hu, and T. G. Thundat, "Design and fabrication of a piezoresistive microcantilever array," presented at 208th Meeting of the ECS, Los Angeles, CA, 2005.
    • (2005) 208th Meeting of the ECS
    • Choudhury, A.1    Hesketh, P.J.2    Hu, Z.3    Thundat, T.G.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.