Design optimization of piezoresistive cantilevers for force sensing in air and water

Journal of Applied Physics

Volumn 106, Issue 6, 2009, Pages

  Doll, Joseph C ^a   Park, Sung Jin ^a   Pruitt, Beth L ^a,b  

^a Stanford University   (United States)

^b Durand Building ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL DESIGN METHOD; CHEMICAL SENSING; COMPLEX DOPANTS; DESIGN CONSTRAINTS; DESIGN OPTIMIZATION; DESIGN TOOL; DOPANT PROFILE; DOPED SILICON; FORCE SENSING; MACROSCALES; MEASUREMENT BANDWIDTH; METAL FILM; MICRO ELECTRO MECHANICAL SYSTEM; NON-LINEAR PHENOMENA; OPEN SOURCE SOFTWARE; OPTIMIZATION METHOD; OPTIMIZERS; PIEZO-RESISTIVE CANTILEVERS; PIEZO-RESISTORS; PROPER DESIGN;

ATOMIC FORCE MICROSCOPY; CRYSTAL GROWTH; DESIGN; DOPING (ADDITIVES); MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; OPEN SYSTEMS; SEMICONDUCTING SILICON COMPOUNDS;

OPTIMIZATION;

EID: 70349647011     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3224965     Document Type: Article

References (41)

1. G. Villanueva, J. Plaza, J. Montserrat, F. Perez-Murano, and J. Bausells, Microelectron. Eng. 85, 1120 (2008). 10.1016/j.mee.2008.01.082
2. S.-J. Park, M. B. Goodman, and B. L. Pruitt, Proc. Natl. Acad. Sci. U.S.A. 104, 17376 (2007). 10.1073/pnas.0702138104 (Pubitemid 350219830)
3. G. Binnig, C. F. Quate, and C. Gerber, Phys. Rev. Lett. 56, 930 (1986). 10.1103/PhysRevLett.56.930
4. F. T. Goericke and W. P. King, IEEE Sens. J. 8, 1404 (2008). 10.1109/JSEN.2008.920706
5. M. Tortonese, R. C. Barrett, and C. F. Quate, Appl. Phys. Lett. 62, 834 (1993). 10.1063/1.108593
6. A. Barlian, W.-T. Park, J. Mallon, A. Rastegar, and B. Pruitt, Proc. IEEE 97, 513 (2009). 10.1109/JPROC.2009.2013612
7. S. C. Minne, J. D. Adams, G. Yaralioglu, S. R. Manalis, A. Atalar, and C. F. Quate, Appl. Phys. Lett. 73, 1742 (1998). 10.1063/1.122263 (Pubitemid 128671971)
8. R. P. Ried, H. J. Mamin, B. D. Terris, L. S. Fan, and D. Rugar, Solid State Sensors and Actuators 1, 447 (1997). 10.1109/SENSOR.1997.613682
9. C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand, and H. Baltes, Nature (London) 414, 293 (2001). 10.1038/35104535 (Pubitemid 33097802)
10. J. Harley and T. Kenny, J. Microelectromech. Syst. 9, 226 (2000).
11. X. Yu, J. Thaysen, O. Hansen, and A. Boisen, J. Appl. Phys. 92, 6296 (2002). 10.1063/1.1493660 (Pubitemid 35445644)
12. E. Chow, H. Soh, H. Lee, J. Adams, S. Minne, G. Yaralioglu, A. Atalar, C. Quate, and T. Kenny, Sens. Actuators, A 83, 118 (2000). 10.1016/S0924-4247(99) 00381-7 (Pubitemid 30862318)
13. Z. Wang, R. Yue, R. Zhang, and L. Liu, Sens. Actuators, A 120, 325 (2005). 10.1016/j.sna.2004.12.006 (Pubitemid 40567823)
14. M. Papila, R. Haftka, T. Nishida, and M. Sheplak, J. Microelectromech. Syst. 15, 1632 (2006). 10.1109/JMEMS.2006.883884 (Pubitemid 44921782)
15. M. Liu, K. Maute, and D. M. Frangopol, Reliab. Eng. Syst. Saf. 92, 1333 (2007). 10.1016/j.ress.2006.09.007 (Pubitemid 46908042)
16. T. Duc, J. Creemer, and P. Sarro, IEEE Sens. J. 7, 96 (2007). 10.1109/JSEN.2006.886992 (Pubitemid 46113472)
17. J. Creemer, F. Fruett, G. Meijer, and P. French, IEEE Sens. J. 1, 98 (2001). 10.1109/JSEN.2001.936927
18. M. Doelle, D. Mager, P. Ruther, and O. Paul, Sens. Actuators, A 127, 261 (2006). 10.1016/j.sna.2005.08.014
19. F. Goericke, J. Lee, and W. P. King, Sens. Actuators, A 143, 181 (2008). 10.1016/j.sna.2007.10.049
20. R. Roark and W. Young, Formulas for Stress and Strain (McGraw-Hill, New York, 1975).
21. J. Chen and N. MacDonald, Rev. Sci. Instrum. 75, 276 (2004). 10.1063/1.1633005
22. Y. Kanda, IEEE Trans. Electron Devices 29, 64 (1982).
23. J. Richter, J. Pedersen, M. Brandbyge, E. Thomsen, and O. Hansen, J. Appl. Phys. 104, 023715 (2008). 10.1063/1.2960335
24. J. A. Harley and T. W. Kenny, Appl. Phys. Lett. 75, 289 (1999). S0003-6951(99)01728-3
25. M. Tortonese, " Force sensors for scanning probe microcopy.," Ph.D. dissertation, Stanford University, 1993.
26. S.-J. Park, A. Rastegar, T. Fung, A. Barlian, J. Mallon, and B. Pruitt, " Optimization of piezoresistive cantilever performance.," Hilton Head Sensors, Actuators and Microsystems Workshop, 2008), p. 3.
27. T. Gabrielson, U. Center, and P. Warminster, IEEE Trans. Electron Devices 40, 903 (1993). 10.1109/16.210197 (Pubitemid 23635302)
28. O. Hansen and A. Boisen, Nanotechnology 10, 51 (1999). 10.1088/0957-4484/10/1/011
29. M. R. Paul, M. T. Clark, and M. C. Cross, Nanotechnology 17, 4502 (2006). 10.1088/0957-4484/17/17/037
30. J. Arlett, J. Maloney, B. Gudlewski, and M. Muluneh, Nano Lett. 6, 1000 (2006). 10.1021/nl060275y (Pubitemid 43836618)
31. S. Senturia, Microsystem Design (Springer, Berlin, 2000).
32. G. Masetti, M. Severi, and S. Solmi, IEEE Trans. Electron Devices 30, 764 (1983).
33. F. Hooge, IEEE Trans. Electron Devices 151, 3 (1994). 10.1007/1-4020-2170-4
34. J. Mallon, A. Rastegar, A. Barlian, M. Meyer, T. Fung, and B. Pruitt, Appl. Phys. Lett. 92, 3508 (2008). 10.1063/1.2825466 (Pubitemid 351160660)
35. A. Partridge, " Lateral piezoresistive accelerometer with epipoly encapsulation.," Thesis, Stanford University, 2003.
36. C. A. van Eysden and J. E. Sader, J. Appl. Phys. 104, 109901 (2007). 10.1063/1.3009958
37. C. Pramanik, H. Saha, and U. Gangopadhyay, J. Micromech. Microeng. 16, 2060 (2006). 10.1088/0960-1317/16/10/019 (Pubitemid 44403654)
38. C. Zhu, R. Byrd, P. Lu, and J. Nocedal, ACM Trans. Math. Softw. 23, 550 (1997). 10.1145/279232.279236
39. G. Vick and K. Whittle, J. Electrochem. Soc. 116, 1142 (1969). 10.1149/1.2412239
40. F. Trumbore, Micro and Thin-film Electronics: Readings (Holt, Rinehart, and Winston, New York, 1964), p. 177.
41. J. Tsai, Proc. IEEE 57, 1499 (1969). 10.1109/PROC.1969.7325