Design, fabrication and characterization of a two-step released silicon dioxide piezoresistive microcantilever immunosensor

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Zhou, Youzheng ^a   Wang, Zheyao ^a   Wang, Chaonan ^a   Ruan, Wenzhou ^a   Liu, Litian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FREE-BENDING; IN-BETWEEN; ISOTROPIC ETCHING; LAMINATED BEAMS; LAMINATED STRUCTURES; MICRO CANTILEVER SENSORS; MICRO-CANTILEVERS; PIEZO-RESISTIVE; PIEZO-RESISTORS; PIEZORESISTIVE SENSORS; RELEASE METHODS; SELF-HEATING; SILICON DIOXIDE; SILICON DIOXIDE LAYERS; SILICON ON INSULATOR WAFERS; SINGLE CRYSTALLINE SILICON; SPECIFIC BINDING; THEORETICAL MODELS;

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; FABRICATION; HEATING; IMMUNOSENSORS; LAMINATING; MICROSENSORS; SEMICONDUCTING SILICON COMPOUNDS; SILICA; YIELD STRESS;

SILICON WAFERS;

EID: 68149103121     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/065026     Document Type: Article

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