A floating 3D silicon microprobe array for neural drug delivery compatible with electrical recording

Journal of Micromechanics and Microengineering

Volumn 21, Issue 12, 2011, Pages

  Spieth, S ^a   Brett, O ^b   Seidl, K ^b   Aarts, A A A ^c   Erismis, M A ^c   Herwik, S ^b   Trenkle, F ^b   Tatzner S ^a   Auber, J ^a   Daub, M ^b   Neves, H P ^c   Puers, R ^c   Paul, O ^b   Ruther, P ^b   Zengerle, R ^a,b  

^a Institute für Mikro und Informationstechnik   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

^c IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL RECORDING; FLEXIBLE CABLE; LIQUID WATER; MICRO-FLUIDIC INTERFACE; MICROPROBE ARRAYS; NEEDLE-LIKE PROBE; PARYLENE C; POLYDIMETHYLSILOXANE PDMS; SILICON PLATFORMS; SILICON PROBE; SILICON-BASED; SPACE BETWEEN; SPECIFIC DESIGN; TRANSMISSION RATES; WATER VAPOUR; WATER VAPOUR PERMEABILITY;

CABLES; DRUG DELIVERY; LIQUIDS; MICROCHANNELS; MICROFLUIDICS; PROBES; THREE DIMENSIONAL;

SILICONES;

EID: 84855460560     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/12/125001     Document Type: Article

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