A microassembled low-profile three-dimensional microelectrode array for neural prosthesis applications

Journal of Microelectromechanical Systems

Volumn 16, Issue 4, 2007, Pages 977-988

  Yao, Ying ^a   Gulari, Mayurachat Ning ^a   Wiler, James A ^b   Wise, Kensall D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b UNIVERSITY OF MICHIGAN HEALTH SYSTEM   (United States)

Author keywords

Biomedical electrodes; Microassembly

Indexed keywords

BIOMEDICAL EQUIPMENT; MICROELECTRODES; MOS DEVICES; SEMICONDUCTING SILICON; SILICON WAFERS;

BIOMEDICAL ELECTRODES; MICROASSEMBLY; MICROELECTRODE ARRAY; NEURAL PROSTHESES;

PROSTHETICS;

EID: 34548008149     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.896712     Document Type: Article

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