Dual-side and three-dimensional microelectrode arrays fabricated from ultra-thin silicon substrates

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Du, Jiangang ^a   Roukes, Michael L ^a   Masmanidis, Sotiris C ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; FLIP CHIP DEVICES; MATERIALS HANDLING; MICROELECTRODES; REACTIVE ION ETCHING; SIGNAL TO NOISE RATIO; SILICON; SUBSTRATES;

ELECTRODE ARRAYS; EXTRACELLULAR; FRAGILE MATERIALS; IMPLANTABLE MICROELECTRODE ARRAYS; MICROELECTRODES ARRAYS; SILICON DEVICES; SUPPORT MECHANISM; TEMPORARY SUBSTRATES; THIN SILICON SUBSTRATE; ULTRATHIN SILICON;

PRINTED CIRCUIT BOARDS;

EID: 67849099373     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/075008     Document Type: Article

References (23)

1. Cheung K 2007 Implantable microscale neural interfaces Biomed. Microdevices 9 923-38
2. Wise K D, Sodagar A M, Yao Y, Ning Gulari M, Perlin G E and Najafi K 2008 Microelectrodes, microelectronics, and implantable neural microsystems Proc. IEEE 96 1184-202
3. Najafi K and Wise K D 1986 An implantable multielectrode array with on-chip signal processing IEEE J. Solid-State Circuits 21 1035-44
4. Chen J, Wise K D, Hetke J F and Bledsoe S C 1997 A multichannel neural probe for selective chemical delivery at the cellular level IEEE Trans. Biomed. Eng. 44 760-9
5. Anderson D J, Najafi K, Tanghe S J, Evans D A, Levy K L, Hetke J F, Xue X, Zappia J J and Wise K D 1989 Batch-fabricated thin-film electrodes for stimulation of the central auditory system IEEE Trans. Biomed. Eng. 36 693-704
6. Csicsvari J, Henze D A, Jamieson B, Harris K D, Sirota A, Bartho P, Wise K D and Buzsaki G 2003 Massively parallel recording of unit and local field potentials with silicon-based electrodes J. Neurophysiol. 90 1314-23
7. Najafi K, Wise K D and Mochizuki T 1985 A high-yield IC-compatible multichannel recording array IEEE Trans. Electron Devices 32 1206-11
8. Campbell P K, Jones K E, Huber R J, Horch K W and Normann R A 1991 A silicon-based, three dimensional neural interface: manufacturing processes for an intracortical electrode array IEEE Trans. Biomed. Eng. 38 758-68
9. Bai Q, Wise K D and Anderson D J 2000 A high-yield microassembly structure for three-dimensional microelectrode arrays IEEE Trans. Biomed. Eng. 47 281-9
10. Yao Y, Ning Gulari M, Wiler J A and Wise K D 2007 A microassembled low-profile three-dimensional microelectrode array for neural prosthesis applications J. Microelectromech. Syst. 16 977-88
11. Takeuchi S, Suzuki T, Mabuchi K and Fujita H 2004 3D flexible multichannel neural probe array J. Micromech. Microeng. 14 104-7
12. Neves H P, Orban G A, Koudelka-Hep M, Stieglitz T and Ruther P 2007 Development of modular multifunctional probe arrays for cerebral applications Proc. IEEE Eng. Med. Biol. Soc. 104-9
13. Norlin P, Kindlundh M, Mouroux A, Yoshida K and Hofmann U G 2002 A 32-site neural recording probe fabricated by DRIE of SOI substrates J. Micromech. Microeng. 12 414-9
14. Cheung K C, Djupsund K, Dan Y and Lee L P 2003 Implantable multichannel electrode array based on SOI technology J. Microelectromech. Syst 12 179-84
15. Du J, Riedel-Kruse I H, Nawroth J C, Roukes M L, Laurent G and Masmanidis S C 2009 High-resolution three-dimensional extracellular recording of neuronal activity with microfabricated electrode arrays J. Neurophysiol. 101 1671-8
16. Moffitt M A and McIntyre C C 2005 Model-based analysis of cortical recording with silicon microelectrodes Clin. Neurophysiol. 116 2240-50
17. Perlin G E and Wise K D 2004 The effect of the substrate on the extracellular neural activity recorded with micromachined silicon microprobes Conf. Proc. IEEE Eng. Med. Biol. Soc. 2002-5
18. Stieglitz T and Gross M 2002 Flexible BIOMEMS with electrode arrangements on front and back side as key component in neural prostheses and biohybrid systems Sensors Actuators B 83 8-14
19. Pang C, Cham J G, Nenadic Z, Musallam S, Tai Y C, Burdick J W and Andersen R A 2005 A new multi-site probe array with monolithically integrated parylene flexible cable for neural prostheses Conf. Proc. IEEE Eng. Med. Biol. Soc. p 7114
20. Robinson D A 1968 The electrical properties of metal microelectrodes Proc. IEEE 56 1065-71
21. Najafi K, Ji J and Wise K D 1990 Scaling limitations of silicon micromachined recording probes IEEE Trans. Biomed. Eng. 37 1-11
22. Drake K L, Wise K D, Farraye J, Anderson D J and BeMent S L 1988 Performance of planar multisite microprobes in recording extracellular single-unit intracortical activity IEEE Trans. Biomed. Eng. 35 719-32
23. Hassibi A, Navid R, Dutton R W and Lee T H 2004 Comprehensive study of noise processes in electrode electrolyte interfaces J. Appl. Phys. 96 1074-82