A 32-site neural recording probe fabricated by DRIE of SOI substrates

Journal of Micromechanics and Microengineering

Volumn 12, Issue 4, 2002, Pages 414-419

  Norlin, Peter ^a   Kindlundh, Maria ^a   Mouroux, Aliette ^a,d   Yoshida, Ken ^b   Hofmann, Ulrich G ^c  

^a ACREO AB   (Sweden)

^b AALBORG UNIVERSITY   (Denmark)

^c UNIVERSITY OF LÜBECK   (Germany)

^d INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTRON BEAMS; MICROMACHINING; PROBES; REACTIVE ION ETCHING;

DEEP REACTIVE ION ETCHING; NEURAL RECORDING PROBE;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0036645870     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/4/312     Document Type: Article

References (16)

1. News feature: Windows on the brain
2. An integrated-circuit approach to extracellular microelectrodes
3. A high-yield IC-compatible multichannel recording array
4. Integration of multi-microelectrode and interface circuits by silicon planar and three-dimensional fabrication technology
5. An implantable multielectrode array with on-chip signal processing
6. Plasma-etched neural probes
7. A silicon-based, three-dimensional neural interface: Manufacturing processes for an intracortical electrode array
8. Thin-film multielectrode arrays for a cochlear prosthesis
9. Flexible BIOMEMS with electrode arrangements on front and back side as key component in neural prostheses and biohybrid systems
10. On the design of multi-site microelectrodes for neuronal recordings
11. A new neural probe using SOI wafers with topological interlocking mechanisms
12. Factors influencing the biocompatibility of insertable silicon microshafts in cerebral cortex
13. Measurement of complex impedance spectra of implanted electrodes
14. A micromachined silicon sieve electrode for nerve regeneration applications
15. Activated Ir: An electrode suitable for reversible charge injection in saline solution