Diffusion-limited deposition of parylene C

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 239-250

  Von Metzen, Rene P ^a   Lass, Nils ^a   Ruther, Patrick ^a   Stieglitz, Thomas ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Biomedical materials; coatings; implantable biomedical devices; neural implants; parylene

Indexed keywords

APERTURE SIZES; BIOELECTRIC SIGNALS; BIOMEDICAL MATERIAL; DIFFUSION LIMITATIONS; DIFFUSION LIMITED; ELECTRODE SITES; GEOMETRIC PARAMETER; IMPLANTABLE BIOMEDICAL DEVICES; NEURAL IMPLANTS; ONE STEP; PARYLENE C; PARYLENES; POLYMER LAYERS; SMOOTH TRANSITIONS;

BIOELECTRIC PHENOMENA; BIOMEDICAL ENGINEERING; COATINGS; MICROELECTRODES; NEEDLES;

DIFFUSION;

EID: 79551574586     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2090508     Document Type: Article

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