Influence of the oxygen partial pressure and post-deposition annealing on the structure and optical properties of ZnO films grown by dc magnetron sputtering at room temperature

Journal of Physics D: Applied Physics

Volumn 45, Issue 2, 2012, Pages

  Yuste, M ^a   Escobar Galindo, R ^a   Caretti, I ^a   Torres, R ^a   Snchez, O ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

BAND GAP ENERGY; CHEMICAL COMPOSITIONS; CRYSTAL PLANES; CRYSTAL QUALITIES; CRYSTALLINE STRUCTURE; CRYSTALLINITIES; DC MAGNETRON SPUTTERING; DEGREE OF CRYSTALLINITY; DEPOSITION PROCESS; GROWTH CONDITIONS; OPTICAL PERFORMANCE; OPTICAL RESPONSE; OXYGEN GAS FLOW; OXYGEN PARTIAL PRESSURE; POST DEPOSITION ANNEALING; ROOM TEMPERATURE; SYSTEMATIC STUDY; X-RAY ABSORPTION NEAR-EDGE STRUCTURE; XANES; ZNO; ZNO FILMS; ZNO THIN FILM;

DEPOSITION; METALLIC FILMS; MOLECULAR OXYGEN; OPTICAL PROPERTIES; PARTIAL PRESSURE; POSITIVE IONS; QUALITY CONTROL; THIN FILMS; VAPOR DEPOSITION; X RAY ABSORPTION NEAR EDGE STRUCTURE SPECTROSCOPY; X RAY DIFFRACTION; ZINC OXIDE;

OPTICAL FILMS;

EID: 84255193246     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/2/025303     Document Type: Article

References (60)

1. Fortunato E, Brida D, Ferreira I, Aguas H, Nunes P and Martins R 2001 Thin Solid Films 383 31013
2. Lin L Y, Jeong M C, Kim D E and Myoung J M 2006 Surf. Coat. Technol. 201 254752
3. Berginski M, Hpkes J, Schulte M, Schpe G, Stiebig H, Rech B and Wuttig M 2007 J. Appl. Phys. 101 074903-11
4. Tvarozek V, Novotny I, Sutta P, Flickyngerova S, Schtereva K and Vavrinsky E 2007 Thin Solid Films 515 875660
5. Wang Z L 2004 Mater. Today 7 2633
6. Fortunato E, Goņalves A, Pimentel A, Barquinha P, Goņalves G, Pereira L, Ferreira I and Martins R 2009 Appl. Phys. A 96 197205
7. Carcia P F, McLean R S, Reilly M H, Crawford M K, Blanchard E N, Kattamis A Z and Wagner S 2007 J. Appl. Phys. 102 074512
8. Nanomarkets 2011 Zinc Oxide Market Opportunities, http://nanomarkets.net/ articles/article/zinc-oxide-market-opportunities
9. Matsuia H and Tabata H 2005 Appl. Phys. Lett. 87 143109
10. Xua C X, Suna X W, Dongb Z L and Yuc M B J 2004 Cryst. Growth 270 498504
11. Manzoor U and Kim D K 2009 Physica E 41 5005
12. Zhang C 2010 J. Phys. Chem. Solids 71 3649
13. Gabs M, Daz-Carrasco P, Agull-Rueda F, Herrero P, Landa-Cnovas A R and Ramos-Barrado J R 2011 Sol. Energy Mater. Sol. Cells 95 232734
14. Ho G W and Wong A S W 2007 Appl. Phys. A 86 45762
15. Morgan J H and Brodie D E 1982 Can. J. Phys. 60 138790
16. Webb J B, Williams D F and Buchanan M 1981 Appl. Phys. Lett. 39 6402
17. Mancini A M, Pierini P, Valentini A, Vasanelli L and Quirini A 1985 Thin Solid Films 124 8592
18. Eberspacher C, Fahrenbruch A L and Bube R H 1986 Thin Solid Films 136 110
19. Anders A, Lim S H N, Yu K M, Andersson J, Rośn J, McFarland M and Brown J 2010 Thin Solid Films 518 33139
20. Ma Q B, Ye Z Z, He H P, Zhu L P and Zhao B H 2007 Mater. Sci. Semicond. Process. 10 16772
21. Gao W and Li Z 2004 Ceram. Int. 30 11559
22. Singh S, Srinivasa R S and Major S S 2007 Thin Solid Films 515 871822
23. Zhu S, Su C H, Lehoczky S L, Peters P and George M A 2000 J. Cryst. Growth 211 10610
24. Youssef S, Combette P, Podlecki J, Al Asmar R and Foucaran A 2009 Cryst. Growth Des. 9 108894
25. Mirica E, Kowach G, Evans P and Du H 2004 Cryst. Growth Des. 4 1579
26. Gao Y and Nagai M 2006 Langmuir 22 393640
27. Song D, Aberle A G and Xia 2002 Appl. Surf. Sci. 195 2916
28. Climent-Font A, Pszti F, Garca G, Fernndez-Jiḿnez M T and Agull F 2004 Nucl. Instrum. Methods B 219 4004
29. Kotai E 1994 Nucl. Instrum. Methods B 85 58896
30. CompleteEASE version 4.06 1999-2009 J.A. Woollam Co., Inc. http://www.jawoollam.com/completeease.html - ref-separator -
31. Fornís E, Escobar Galindo R, Snchez O and Albella J M 2006 Surf. Coat. Technol. 200 604753
32. 2011 WebElements: the periodic table on the web, http://www.webelements. com - ref-separator -
33. Ellmer K, Klein A and Rech B 2008 Transparent Conductive Zinc Oxide: Basics and Applications in Thin Film Solar Cells (Berlin: Springer) p 212
34. Washington P L, Ong H C, Dai J Y and Chang R P H 1998 Appl. Phys. Lett 72 32613
35. PCPDFWIN version 2.2 2001 JCPDS-ICDD http://www.icdd.com - ref-separator -
36. Lee Y C et al 2009 J. Lumin. 129 14852
37. Kumar R, Khare N, Kumar V and Bhalla G L 2008 Appl. Surf. Sci. 254 650913
38. Zhu X and Sakka Y 2008 Sci. Technol. Adv. Mater. 9 033001
39. Floro J A, Hearne S J, Hunter J A, Kotula P, Chason E, Seel S C and Thompson C V 2001 J. Appl. Phys. 89 488697
40. Chen J J, Gao Y, Zeng F, Li D M and Pa F 2004 Appl. Surf. Sci. 223 31829
41. Movchan B A and Demchishin A V 1969 Fiz. Met. Metalloved. 28 665360
42. Thornton J A 1977 Annu. Rev. Mater. Sci. 7 23960
43. Tompkins H G and McGahan W A 1999 Spectroscopic Ellipsometry and Reflectometry (New York: Wiley) p 93
44. Paraguay D F, Estrada L W, Acosta N D R, Andrade E and Miki-Yoshida M 1999 Thin Solid Films 350 192202
45. Li Q H, Zhu D, Liu W, Liu Y and Ma X C 2008 Appl. Surf. Sci. 254 29226
46. El Zawawi I K and Abd Alla R A 1999 Thin Solid Films 339 3149
47. Tan S T, Chen B J, Sun X W, Fan W J, Kwok H S, Zhang X H and Chua X H 2005 J. Appl. Phys. 98 013505
48. Wu L, Wu Y and L W 2005 Physica E 28 7682
49. Djouadi D, Chelouche A, Aksas A and Sebais M 2009 Phys. Procedia 2 7015
50. Gupta P, Colvin V L and George S M 1988 Phys. Rev. B 37 823443
51. Vinnichenko M, Gago R, Cornelius S, Shevchenko N, Rogozin A, Kolitsch A, Munnik F and Mller W 2010 Appl. Phys. Lett. 96 141907
52. Singh A P, Kumar R, Thakur P, Brookes N B, Chae K H and Choi WK 2009 J. Phys.: Condens. Matter 21 185005
53. Persson C et al 2006 Microelectr. J. 37 6869
54. Guo J H, Vayssieres L, Persson C, Ahuja R, Johansson B and Nordgren J 2002 J. Phys.: Condens. Matter 14 696974
55. Thakur P, Chae K H, Kim J Y, Subramanian M, Jayavel R and Asokan K 2007 Appl. Phys. Lett. 91 162503
56. Groot F M F, Grioni M, Fuggle J C, Ghijsen J, Sawatzky GA and Petersen H 1989 Phys. Rev. B 40 571523
57. Yan W, Sun Z, Liu Q, Li Z, Pan Z, Wang J, Wei S, Wang D, Zhou and Zhang X 2007 Appl. Phys. Lett. 91 062113
58. Outka D A, Sthr J and Jark W 1987 Phys. Rev. B 35 411922
59. Kim C M, Jeong H S and Kim E H 2000 Surf. Sci. 459 45761
60. Gago R, Jimenez I, Garcia I and Albella J M 2002 Vacuum 64 199204