Micro/nanomechanical properties of aluminum-doped zinc oxide films prepared by radio frequency magnetron sputtering

Surface and Coatings Technology

Volumn 201, Issue 6, 2006, Pages 2547-2552

  Lin, Li Yu ^a   Jeong, Min Chang ^a   Kim, Dae Eun ^a   Myoung, Jae Min ^a  

^a Yonsei University   (South Korea)

Author keywords

Friction; Magnetron sputtering; Nanoindentation; Zinc oxide

Indexed keywords

CRYSTAL STRUCTURE; DEPOSITION; FILM GROWTH; FRICTION; INDENTATION; MECHANICAL PROPERTIES; SILICON WAFERS; TRIBOLOGY; WEAR OF MATERIALS; ZINC OXIDE;

ALUMINUM-DOPED ZINC OXIDE FILMS; MICRO-RECIPROCATING PIN-ON-PLATE TESTER; RADIO FREQUENCY MAGNETRON SPUTTERING;

MAGNETRON SPUTTERING;

CRYSTAL STRUCTURE; DEPOSITION; FILM GROWTH; FRICTION; INDENTATION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; SILICON WAFERS; TRIBOLOGY; WEAR OF MATERIALS; ZINC OXIDE;

EID: 33751003499     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.04.067     Document Type: Article

References (17)

1. Muthukumar S., Emanetoglu N.W., Patounakis G., Gorla C.R., Liang S., and Lu Y. J. Vac. Sci. Technol., A, Vac. Surf. Films 19 (2001) 1850
2. Hwang D.K., Bang K.H., Jeong M.C., and Myoung J.M. J. Cryst. Growth 254 (2003) 449
3. Kim K.H., Park K.C., and Ma D.Y. J. Appl. Phys. 81 (1997) 7764
4. Fang T.H., Jian S.R., and Chuu D.S. J. Phys., D: Appl. Phys. 36 (2003) 878
5. Deng H., Russell J.J., Lamb R.N., Jiang B., Li Y., and Zhou X.Y. Thin Solid Films 458 (2004) 43
6. Prasad S.V., Walck S.D., and Zabinski J.S. Thin Solid Films 360 (2000) 107
7. Huang M.H., Wu Y.Y., Feick H., Tran N., Weber E., and Yang P.D. Adv. Mater. 13 (2001) 113
8. Lee W., Jeong M.C., and Myoung J.M. Acta Mater. 52 (2004) 3949
9. Jeong S.H., Kho S., Jung D., Lee S.B., and Boo J.H. Surf. Coat. Technol. 174-175 (2003) 187
10. Oh B.Y., Jeong M.C., Lee W.L., and Myoung J.M. J. Cryst. Growth 274 (2005) 453
11. Zabinski J.S., Corneille J., Prasad S.V., Mcdevitt N.T., and Bultman J.B. J. Mater. Sci. 32 (1997) 5313
12. Prasad S.V., and Zabinski J.S. Wear 203-204 (1997) 496
13. Prasad S.V., Nainaparampil J.J., and Zabinski J.S. J. Vac. Sci. Technol., A: Vac. Surf. Films 20 (2002) 1738
14. Pergande S.R., Polycarpou A.A., and Conry T.F. J. Tribol. 126 (2004) 573
15. Charitidis C., and Logothetidis S. Thin Solid Films 482 (2005) 120
16. Bhushan B., and Li X.D. Int. Mater. Rev. 48 (2003) 125
17. Li X.D., and Bhushan B. Mater. Charact. 48 (2002) 11