ZnO thin films produced by magnetron sputtering

Ceramics International

Volumn 30, Issue 7, 2004, Pages 1155-1159

  Gao, Wei ^a   Li, Zhengwei ^a  

^a UNIVERSITY OF AUCKLAND   (New Zealand)

Author keywords

B. Microstructure; Conductivity; D. ZnO; Magnetron sputtering deposition; Photoluminescence; Thin films

Indexed keywords

ENERGY GAP; GLASS; MAGNETRON SPUTTERING; MICROSTRUCTURE; PHOTOLUMINESCENCE; SUBSTRATES; THIN FILMS;

GLASS SUBSTRATES; MAGNETRON SPUTTERING DEPOSITION; PROCESSING PARAMETERS;

ZINC OXIDE;

EID: 4344588950     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2003.12.197     Document Type: Conference Paper

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