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Volumn , Issue , 2011, Pages 24-27

Influence of post-deposition annealing on metal-organic decomposed lanthanum cerium oxide film

Author keywords

breakdown voltage; lanthanum cerium oxide; leakage current; metal organic decomposition; post deposition annealing

Indexed keywords

ANNEALING TEMPERATURES; CERIUM OXIDES; DIFFRACTION PEAKS; LANTHANUM SILICATES; METAL ORGANIC DECOMPOSITION; METAL OXIDE SEMICONDUCTOR; METAL-ORGANIC; POST DEPOSITION ANNEALING; SI SUBSTRATES;

EID: 83755174173     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RSM.2011.6088283     Document Type: Conference Paper
Times cited : (11)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.