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Volumn 87, Issue 11, 2010, Pages 2158-2162

60Co gamma irradiation effects on electrical characteristics of Al/Y2O3/n-Si/Al capacitors

Author keywords

Gamma irradiation; MOS structure; Thermal annealing; Yttrium oxide

Indexed keywords

ANNEALING TREATMENTS; CAPACITANCE VOLTAGE; CRYSTALLINE STATE; ELECTRICAL CHARACTERISTIC; ELECTRICAL PROPERTY; FLAT-BAND VOLTAGE; GAMMA IRRADIATION; GAMMA RAY SOURCES; HIGH FREQUENCY HF; INTERFACE TRAPS; MOS STRUCTURE; QUASI-STATIC; SILICATE LAYERS; THERMAL-ANNEALING; THIN FILM MATERIAL; XRD;

EID: 77955496637     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.01.018     Document Type: Article
Times cited : (9)

References (23)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.