Higher-k LaYOx films with strong moisture resistance

Applied Physics Letters

Volumn 89, Issue 25, 2006, Pages

  Zhao, Yi ^a   Kita, Koji ^a   Kyuno, Kentaro ^a   Toriumi, Akira ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; HIGH TEMPERATURE EFFECTS; LANTHANUM COMPOUNDS; MOISTURE; PERMITTIVITY;

HEXAGONAL PHASE; MOISTURE RESISTANCE;

THIN FILMS;

EID: 33845946419     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2420794     Document Type: Article

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