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Volumn , Issue , 2009, Pages 625-627
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Permittivity enhancement and dielectric relaxation of doped hafnium and zirconium oxide
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Author keywords
[No Author keywords available]
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Indexed keywords
CONCENTRATION OF;
CRYSTALLINE PHASIS;
DOPED ZIRCONIA;
FREQUENCY DISPERSION;
K-VALUES;
ZIRCONIUM OXIDE;
CERIUM;
DIELECTRIC RELAXATION;
FAILURE ANALYSIS;
HAFNIUM;
INTEGRATED CIRCUITS;
QUALITY ASSURANCE;
SAFETY FACTOR;
ZIRCONIA;
ZIRCONIUM;
DOPING (ADDITIVES);
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EID: 71049159606
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/IPFA.2009.5232568 Document Type: Conference Paper |
Times cited : (5)
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References (5)
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