A novel fabrication method for centimeter-long surface-micromachined nanochannels

Journal of Micromechanics and Microengineering

Volumn 20, Issue 1, 2010, Pages

  Huang, Xiaojun Trent ^a   Gupta, Cherry ^a   Pennathur, Sumita ^a  

^a Santa Barbara   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOFLUIDICS; SURFACE MICROMACHINING; TEMPERATURE;

CHANNEL CHARACTERISTICS; CONVENTIONAL APPROACH; FABRICATION METHOD; LOW-TEMPERATURE FABRICATION; NANOFLUIDIC CHANNEL; SACRIFICIAL LAYER; STRESS-INDUCED DEFORMATION; SURFACE HYDROPHOBICITY;

DEFORMATION;

EID: 81455153170     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/1/015040     Document Type: Article

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