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Volumn 50, Issue 2, 2012, Pages 140-147

Titanium micromachining by femtosecond laser

Author keywords

Ablation depth; Ablation regime; Femtosecond laser; Spike formation

Indexed keywords

ABLATION DEPTH; ABLATION REGIME; CHANNEL DEPTH; FEMTO-SECOND LASER; FLUENCES; LASER-PULSE ENERGY; LOGARITHMIC DEPENDENCE; MICROCHANNEL SURFACES; OPTICAL PENETRATION; PULSE ENERGIES; SPIKE FORMATION; TRANSLATION SPEED;

EID: 80655148886     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2011.09.016     Document Type: Article
Times cited : (23)

References (44)
  • 2
    • 80655131893 scopus 로고    scopus 로고
    • Industrial applications of ultrahigh precision short-pulse laser processing (invited paper)
    • San Jose, CA, USA: SPIE
    • Liu X. Industrial applications of ultrahigh precision short-pulse laser processing (invited paper). Photon processing in microelectronics and photonics iv, vol. 5713, San Jose, CA, USA: SPIE; 2005, pp. 372386.
    • (2005) Photon Processing in Microelectronics and Photonics Iv , vol.5713 , pp. 372386
    • Liu, X.1
  • 5
    • 0031258062 scopus 로고    scopus 로고
    • Laser ablation and micromachining with ultrashort laser pulses
    • 10.1109/3.631270 1997;33:17061716
    • Liu X., Du D., Mourou G. Laser ablation and micromachining with ultrashort laser pulses. IEEE, J Quant Electron 10.1109/3.631270 1997;33:17061716.
    • IEEE, J Quant Electron
    • Liu, X.1    Du, D.2    Mourou, G.3
  • 6
    • 0036979673 scopus 로고    scopus 로고
    • Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses
    • S.K. Sundaram, and E. Mazur Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses Nat Mater 1 2002 217 224
    • (2002) Nat Mater , vol.1 , pp. 217-224
    • Sundaram, S.K.1    Mazur, E.2
  • 7
    • 41549088314 scopus 로고    scopus 로고
    • Femtosecond laser micromachining in transparent materials
    • R.R. Gattass, and E. Mazur Femtosecond laser micromachining in transparent materials Nat Photon 2 2008 219 225
    • (2008) Nat Photon , vol.2 , pp. 219-225
    • Gattass, R.R.1    Mazur, E.2
  • 8
    • 0037341022 scopus 로고    scopus 로고
    • Bulk heating of transparent materials using a high-repetition-rate femtosecond laser
    • C.B. Schaffer, J.F. García, and E. Mazur Bulk heating of transparent materials using a high-repetition-rate femtosecond laser Appl Phys A: Mater Sci Process 76 2003 351 354
    • (2003) Appl Phys A: Mater Sci Process , vol.76 , pp. 351-354
    • Schaffer, C.B.1    García, J.F.2    Mazur, E.3
  • 14
    • 0036534118 scopus 로고    scopus 로고
    • Femtosecond pulsed laser ablation of thin gold film
    • DOI 10.1016/S0030-3992(01)00110-4, PII S0030399201001104
    • K. Venkatakrishnan, and B. Tan Ngoi BKA. Femtosecond pulsed laser ablation of thin gold film Opt Laser Technol 34 2002 199 202 (Pubitemid 34284559)
    • (2002) Optics and Laser Technology , vol.34 , Issue.3 , pp. 199-202
    • Venkatakrishnan, K.1    Tan, B.2    Ngoi, B.K.A.3
  • 17
    • 12844278863 scopus 로고    scopus 로고
    • Femtosecond laser-induced formation of submicrometer spikes on silicon in water
    • DOI 10.1063/1.1828575
    • M.Y. Shen, C.H. Crouch, J.E. Carey, and E. Mazur Femtosecond laser-induced formation of submicrometer spikes on silicon in water Appl Phys Lett 85 2004 5694 5696 (Pubitemid 40162566)
    • (2004) Applied Physics Letters , vol.85 , Issue.23 , pp. 5694-5696
    • Shen, M.Y.1    Crouch, C.H.2    Carey, J.E.3    Mazur, E.4
  • 19
    • 0000050015 scopus 로고    scopus 로고
    • Microstructuring of silicon with femtosecond laser pulses
    • DOI 10.1063/1.122241, PII S0003695198012388
    • T.-H. Her, R.J. Finlay, C. Wu, S. Deliwala, and E. Mazur Microstructuring of silicon with femtosecond laser pulses Appl Phys Lett 73 1998 1673 1675 (Pubitemid 128671948)
    • (1998) Applied Physics Letters , vol.73 , Issue.12 , pp. 1673-1675
    • Her, T.-H.1    Finlay, R.J.2    Wu, C.3    Deliwala, S.4    Mazur, E.5
  • 21
    • 17044431074 scopus 로고    scopus 로고
    • Evolution of silicon surface microstructures by picosecond and femtosecond laser irradiations
    • DOI 10.1016/j.apsusc.2004.09.113, PII S0169433204014692
    • J. Zhu, G. Yin, M. Zhao, D. Chen, and L. Zhao Evolution of silicon surface microstructures by picosecond and femtosecond laser irradiations Appl Surf Sci 245 2005 102 108 (Pubitemid 40497266)
    • (2005) Applied Surface Science , vol.245 , Issue.1-4 , pp. 102-108
    • Zhu, J.1    Yin, G.2    Zhao, M.3    Chen, D.4    Zhao, L.5
  • 22
    • 47249110621 scopus 로고    scopus 로고
    • Morphologies and nonlinear scaling of laser damage on glass surfaces by tightly focused femtosecond pulses
    • J.F. Herbstman, A.J. Hunt, and S.M. Yalisove Morphologies and nonlinear scaling of laser damage on glass surfaces by tightly focused femtosecond pulses Appl Phys Lett 93 2008 011112 011113
    • (2008) Appl Phys Lett , vol.93 , pp. 011112-011113
    • Herbstman, J.F.1    Hunt, A.J.2    Yalisove, S.M.3
  • 23
    • 1642588423 scopus 로고    scopus 로고
    • Morphology of femtosecond laser-induced structural changes in bulk transparent materials
    • C.B. Schaffer, A.O. Jamison, and E. Mazur Morphology of femtosecond laser-induced structural changes in bulk transparent materials Appl Phys Lett 84 2004 1441 1443
    • (2004) Appl Phys Lett , vol.84 , pp. 1441-1443
    • Schaffer, C.B.1    Jamison, A.O.2    Mazur, E.3
  • 26
    • 67649927685 scopus 로고    scopus 로고
    • Molecular dynamics simulations of laser ablation: The Morse potential function approach
    • DOI 10.1504/IJNM.2007.017992
    • P. Stavropoulos, and G. Chryssolouris Molecular dynamics simulations of laser ablation: the morse potential function approach Int J Nanomanuf 1 6 2007 736 750 (Pubitemid 351638789)
    • (2007) International Journal of Nanomanufacturing , vol.1 , Issue.6 , pp. 736-750
    • Stavropoulos, P.1    Chryssolouris, G.2
  • 28
    • 0037415137 scopus 로고    scopus 로고
    • Customization of poly(dimethylsiloxane) stamps by micromachining using a femtosecond-pulsed laser
    • D.B. Wolfe, J.B. Ashcom, J.C. Hwang, C.B. Schaffer, E. Mazur, and G.M. Whitesides Customization of poly(dimethylsiloxane) stamps by micromachining using a femtosecond-pulsed laser Adv Mater 15 2003 62 65
    • (2003) Adv Mater , vol.15 , pp. 62-65
    • Wolfe, D.B.1    Ashcom, J.B.2    Hwang, J.C.3    Schaffer, C.B.4    Mazur, E.5    Whitesides, G.M.6
  • 29
    • 77953130988 scopus 로고    scopus 로고
    • Fabrication of spiral-shaped microfluidic channels in glass by femtosecond laser
    • Y. Li, and S-liang Qu Fabrication of spiral-shaped microfluidic channels in glass by femtosecond laser Mater Lett 64 2010 1427 1429
    • (2010) Mater Lett , vol.64 , pp. 1427-1429
    • Li, Y.1    Qu, S.-L.2
  • 33
    • 58049204397 scopus 로고    scopus 로고
    • Fabrication of three-dimensional microfluidic channels in glass by femtosecond pulses
    • C. Li, X. Shi, J. Si, T. Chen, F. Chen, A. Li, and X. Hou Fabrication of three-dimensional microfluidic channels in glass by femtosecond pulses Opt Commun 282 2009 657 660
    • (2009) Opt Commun , vol.282 , pp. 657-660
    • Li, C.1    Shi, X.2    Si, J.3    Chen, T.4    Chen, F.5    Li, A.6    Hou, X.7
  • 36
    • 3042845410 scopus 로고    scopus 로고
    • Femtosecond laser micromachining of grooves in indium phosphide
    • A. Borowiec, and H.K. Haugen Femtosecond laser micromachining of grooves in indium phosphide Appl Phys A: Mater Sci Process 79 2004 521 529
    • (2004) Appl Phys A: Mater Sci Process , vol.79 , pp. 521-529
    • Borowiec, A.1    Haugen, H.K.2
  • 38
    • 33646500842 scopus 로고    scopus 로고
    • Femtosecond pulsed laser direct write production of nano- and microfluidic channels
    • 183113-3
    • J.P. McDonald, V.R. Mistry, K.E. Ray, and S.M. Yalisove Femtosecond pulsed laser direct write production of nano- and microfluidic channels Appl Phys Lett 88 2006 183113-3
    • (2006) Appl Phys Lett , vol.88
    • McDonald, J.P.1    Mistry, V.R.2    Ray, K.E.3    Yalisove, S.M.4
  • 39
    • 37549066369 scopus 로고    scopus 로고
    • Formation of nano-textured conical microstructures in titanium metal surface by femtosecond laser irradiation
    • B.K. Nayak, M.C. Gupta, and K.W. Kolasinski Formation of nano-textured conical microstructures in titanium metal surface by femtosecond laser irradiation Appl Phys A: Mater Sci Process 90 2008 399 402
    • (2008) Appl Phys A: Mater Sci Process , vol.90 , pp. 399-402
    • Nayak, B.K.1    Gupta, M.C.2    Kolasinski, K.W.3
  • 40
    • 77955419571 scopus 로고    scopus 로고
    • Self-organized micro/nano structures in metal surfaces by ultrafast laser irradiation
    • B.K. Nayak, and M.C. Gupta Self-organized micro/nano structures in metal surfaces by ultrafast laser irradiation Opt Lasers Eng 48 2010 940 949
    • (2010) Opt Lasers Eng , vol.48 , pp. 940-949
    • Nayak, B.K.1    Gupta, M.C.2
  • 41
    • 67349207364 scopus 로고    scopus 로고
    • Surface micro/nanostructuring of titanium under stationary and non-stationary femtosecond laser irradiation
    • V. Oliveira, S. Ausset, and R. Vilar Surface micro/nanostructuring of titanium under stationary and non-stationary femtosecond laser irradiation Appl Surf Sci 255 2009 7556 7560
    • (2009) Appl Surf Sci , vol.255 , pp. 7556-7560
    • Oliveira, V.1    Ausset, S.2    Vilar, R.3
  • 42
    • 0038015695 scopus 로고    scopus 로고
    • Surface modifications induced by ns and sub-ps excimer laser pulses on titanium implant material
    • DOI 10.1016/S0142-9612(03)00318-1
    • M. Bereznai, I. Pelsöczi, Z. Toth, K. Turzo, M. Radnai, Z. Bor, and A. Fazekas Surface modifications induced by ns and sub-ps excimer laser pulses on titanium implant material Biomaterials 24 2003 4197 4203 (Pubitemid 36809022)
    • (2003) Biomaterials , vol.24 , Issue.23 , pp. 4197-4203
    • Bereznai, M.1    Pelsoczi, I.2    Toth, Z.3    Turzo, K.4    Radnai, M.5    Bor, Z.6    Fazekas, A.7
  • 43
    • 70749098670 scopus 로고    scopus 로고
    • Surface microstructuring of Ti plates by femtosecond lasers in liquid ambiences: A new approach to improving biocompatibility
    • Y. Yang, J. Yang, C. Liang, H. Wang, X. Zhu, and N. Zhang Surface microstructuring of Ti plates by femtosecond lasers in liquid ambiences: a new approach to improving biocompatibility Opt Express 17 2009 21124 21133
    • (2009) Opt Express , vol.17 , pp. 21124-21133
    • Yang, Y.1    Yang, J.2    Liang, C.3    Wang, H.4    Zhu, X.5    Zhang, N.6
  • 44
    • 77956054441 scopus 로고    scopus 로고
    • Experimental and theoretical investigation of the ablation mechanisms during femtosecond laser machining
    • 1/2/3/4
    • P. Stavropoulos, A. Stournaras, K. Salonitis, and G. Chryssolouris Experimental and theoretical investigation of the ablation mechanisms during femtosecond laser machining Int J Nanomanuf 6 1/2/3/4 2010 55 65
    • (2010) Int J Nanomanuf , vol.6 , pp. 55-65
    • Stavropoulos, P.1    Stournaras, A.2    Salonitis, K.3    Chryssolouris, G.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.