-
1
-
-
84984932472
-
Exploring the new world of the genome with DNA microarrays
-
DOI 10.1038/4462
-
Brown, P. O.; Botstein, D. Exploring the New World of the Genome with DNA Microarrays Nat. Genet. 1999, 21, 33-37 (Pubitemid 29031489)
-
(1999)
Nature Genetics
, vol.21
, Issue.SUPPL.
, pp. 33-37
-
-
Brown, P.O.1
Botstein, D.2
-
3
-
-
78049341050
-
DNA-Directed Self-Assembly of Gold Nanoparticles onto Nanopatterned Surfaces: Controlled Placement of Individual Nanoparticles into Regular Arrays
-
Lalander, C. H.; Zheng, Y.; Dhuey, S.; Cabrini, S.; Bach, U. DNA-Directed Self-Assembly of Gold Nanoparticles onto Nanopatterned Surfaces: Controlled Placement of Individual Nanoparticles into Regular Arrays ACS Nano 2010, 4, 6153-6161
-
(2010)
ACS Nano
, vol.4
, pp. 6153-6161
-
-
Lalander, C.H.1
Zheng, Y.2
Dhuey, S.3
Cabrini, S.4
Bach, U.5
-
4
-
-
0032546024
-
DNA-templated assembly and electrode attachment of a conducting silver wire
-
DOI 10.1038/35826
-
Braun, E.; Eichen, Y.; Sivan, U.; Ben-Yoseph, G. DNA-Templated Assembly and Electrode Attachment of a Conducting Silver Wire Nature 1998, 391, 775-778 (Pubitemid 28099671)
-
(1998)
Nature
, vol.391
, Issue.6669
, pp. 775-778
-
-
Braun, E.1
Eichen, Y.2
Sivan, U.3
Ben-Yoseph, G.4
-
5
-
-
85015106657
-
DNA in a material world
-
DOI 10.1038/nature01406
-
Seeman, N. C. DNA in a Material World Nature 2003, 421, 427-431 (Pubitemid 36157949)
-
(2003)
Nature
, vol.421
, Issue.6921
, pp. 427-431
-
-
Seeman, N.C.1
-
6
-
-
33645028600
-
Folding DNA to Create Nanoscale Shapes and Patterns
-
Rothemund, P. W. K. Folding DNA to Create Nanoscale Shapes and Patterns Nature 2006, 440, 297-302
-
(2006)
Nature
, vol.440
, pp. 297-302
-
-
Rothemund, P.W.K.1
-
7
-
-
45749118399
-
Toward reliable gold nanoparticle patterning on self-assembled DNA nanoscaffold
-
DOI 10.1021/ja802853r
-
Sharma, J.; Chhabra, R.; Andersen, C. S.; Gothelf, K. V.; Yan, H.; Liu, Y. Toward Reliable Gold Nanoparticle Patterning on Self-Assembled DNA Nanoscaffold J. Am. Chem. Soc. 2008, 130, 7820-7821 (Pubitemid 351875046)
-
(2008)
Journal of the American Chemical Society
, vol.130
, Issue.25
, pp. 7820-7821
-
-
Sharma, J.1
Chhabra, R.2
Andersen, C.S.3
Gothelf, K.V.4
Yan, H.5
Liu, Y.6
-
8
-
-
46749136342
-
Self-Assembled DNA Nanostructures for Distance-Dependent Multivalent Ligand-Protein Binding
-
Rinker, S.; Ke, Y. G.; Liu, Y.; Chhabra, R.; Yan, H. Self-Assembled DNA Nanostructures for Distance-Dependent Multivalent Ligand-Protein Binding Nat. Nanotechnol. 2008, 3, 418-422
-
(2008)
Nat. Nanotechnol.
, vol.3
, pp. 418-422
-
-
Rinker, S.1
Ke, Y.G.2
Liu, Y.3
Chhabra, R.4
Yan, H.5
-
9
-
-
73849093634
-
Self-Assembly of Carbon Nanotubes into Two-Dimensional Geometries Using DNA Origami Templates
-
Maune, H. T.; Han, S. P.; Barish, R. D.; Bockrath, M.; Goddard, W. A.; Rothemund, P. W. K.; Winfree, E. Self-Assembly of Carbon Nanotubes into Two-Dimensional Geometries Using DNA Origami Templates Nat. Nanotechnol. 2010, 5, 61-66
-
(2010)
Nat. Nanotechnol.
, vol.5
, pp. 61-66
-
-
Maune, H.T.1
Han, S.P.2
Barish, R.D.3
Bockrath, M.4
Goddard, W.A.5
Rothemund, P.W.K.6
Winfree, E.7
-
10
-
-
70149125365
-
Placement and Orientation of Individual DNA Shapes on Lithographically Patterned Surfaces
-
Kershner, R. J.; Bozano, L. D.; Micheel, C. M.; Hung, A. M.; Fornof, A. R.; Cha, J. N.; Rettner, C. T.; Bersani, M.; Frommer, J.; Rothemund, P. W. K. et al. Placement and Orientation of Individual DNA Shapes on Lithographically Patterned Surfaces Nat. Nanotechnol. 2009, 4, 557-561
-
(2009)
Nat. Nanotechnol.
, vol.4
, pp. 557-561
-
-
Kershner, R.J.1
Bozano, L.D.2
Micheel, C.M.3
Hung, A.M.4
Fornof, A.R.5
Cha, J.N.6
Rettner, C.T.7
Bersani, M.8
Frommer, J.9
Rothemund, P.W.K.10
-
11
-
-
70349089084
-
Controlled Delivery of DNA Origami on Patterned Surfaces
-
Gerdon, A. E.; Oh, S. S.; Hsieh, K.; Ke, Y.; Yan, H.; Soh, H. T. Controlled Delivery of DNA Origami on Patterned Surfaces Small 2009, 5, 1942-1946
-
(2009)
Small
, vol.5
, pp. 1942-1946
-
-
Gerdon, A.E.1
Oh, S.S.2
Hsieh, K.3
Ke, Y.4
Yan, H.5
Soh, H.T.6
-
12
-
-
78650115087
-
Interconnecting Gold Islands with DNA Origami Nanotubes
-
Ding, B. Q.; Wu, H.; Xu, W.; Zhao, Z. A.; Liu, Y.; Yu, H. B.; Yan, H. Interconnecting Gold Islands with DNA Origami Nanotubes Nano Lett. 2010, 10, 5065-5069
-
(2010)
Nano Lett.
, vol.10
, pp. 5065-5069
-
-
Ding, B.Q.1
Wu, H.2
Xu, W.3
Zhao, Z.A.4
Liu, Y.5
Yu, H.B.6
Yan, H.7
-
13
-
-
79955925119
-
Chemical Alignment of DNA Origami to Block Copolymer Patterned Arrays of 5 nm Gold Nanoparticles
-
Pearson, A. C.; Pound, E.; Woolley, A. T.; Linford, M. R.; Harb, J. N.; Davis, R. C. Chemical Alignment of DNA Origami to Block Copolymer Patterned Arrays of 5 nm Gold Nanoparticles Nano Lett. 2011, 11, 1981-1987
-
(2011)
Nano Lett.
, vol.11
, pp. 1981-1987
-
-
Pearson, A.C.1
Pound, E.2
Woolley, A.T.3
Linford, M.R.4
Harb, J.N.5
Davis, R.C.6
-
14
-
-
69549103388
-
50 nm DNA Nanoarrays Generated from Uniform Oligonucleotide Films
-
Noh, H.; Hung, A. M.; Choi, C.; Lee, J. H.; Kim, J. Y.; Jin, S.; Cha, J. N. 50 nm DNA Nanoarrays Generated from Uniform Oligonucleotide Films ACS Nano 2009, 3, 2376-2382
-
(2009)
ACS Nano
, vol.3
, pp. 2376-2382
-
-
Noh, H.1
Hung, A.M.2
Choi, C.3
Lee, J.H.4
Kim, J.Y.5
Jin, S.6
Cha, J.N.7
-
15
-
-
61649097951
-
Nanoscale Patterns of Oligonucleotides Formed by Electrohydrodynamic Jet Printing with Applications in Biosensing and Nanomaterials Assembly
-
Park, J. U.; Lee, J. H.; Paik, U.; Lu, Y.; Rogers, J. A. Nanoscale Patterns of Oligonucleotides Formed by Electrohydrodynamic Jet Printing with Applications in Biosensing and Nanomaterials Assembly Nano Lett. 2008, 8, 4210-4216
-
(2008)
Nano Lett.
, vol.8
, pp. 4210-4216
-
-
Park, J.U.1
Lee, J.H.2
Paik, U.3
Lu, Y.4
Rogers, J.A.5
-
16
-
-
21644488013
-
Supramolecular nanostamping: Using DNA as movable type
-
DOI 10.1021/nl050495w
-
Yu, A. A.; Savas, T. A.; Taylor, G. S.; Guiseppe-Elie, A.; Smith, H. I.; Stellacci, F. Supramolecular Nanostamping: Using DNA as Movable Type Nano Lett. 2005, 5, 1061-1064 (Pubitemid 40925417)
-
(2005)
Nano Letters
, vol.5
, Issue.6
, pp. 1061-1064
-
-
Yu, A.A.1
Savas, T.A.2
Taylor, G.S.3
Guiseppe-Elie, A.4
Smith, H.I.5
Stellacci, F.6
-
17
-
-
0037036108
-
Direct patterning of modified oligonucleotides on metals and insulators by dip-pen nanolithography
-
DOI 10.1126/science.1071480
-
Demers, L. M.; Ginger, D. S.; Park, S. J.; Li, Z.; Chung, S. W.; Mirkin, C. A. Direct Patterning of Modified Oligonucleotides on Metals and Insulators by Dip-Pen Nanolithography Science 2002, 296, 1836-1838 (Pubitemid 34596264)
-
(2002)
Science
, vol.296
, Issue.5574
, pp. 1836-1838
-
-
Demers, L.M.1
Ginger, D.S.2
Park, S.-J.3
Li, Z.4
Chung, S.-W.5
Mirkin, C.A.6
-
18
-
-
79251589094
-
Hard-Tip, Soft-Spring Lithography
-
Shim, W.; Braunschweig, A. B.; Liao, X.; Chai, J. N.; Lim, J. K.; Zheng, G. F.; Mirkin, C. A. Hard-Tip, Soft-Spring Lithography Nature 2011, 469, 516-521
-
(2011)
Nature
, vol.469
, pp. 516-521
-
-
Shim, W.1
Braunschweig, A.B.2
Liao, X.3
Chai, J.N.4
Lim, J.K.5
Zheng, G.F.6
Mirkin, C.A.7
-
19
-
-
72849122589
-
Directed Hybridization and Melting of DNA Linkers using Counterion-Screened Electric Fields
-
Wong, I. Y.; Melosh, N. A. Directed Hybridization and Melting of DNA Linkers using Counterion-Screened Electric Fields Nano Lett. 2009, 9, 3521-3526
-
(2009)
Nano Lett.
, vol.9
, pp. 3521-3526
-
-
Wong, I.Y.1
Melosh, N.A.2
-
20
-
-
1942468010
-
Patterning of DNA nanostructures on silicon surface by electron beam lithography of self-assembled monolayer
-
Zhang, G. J.; Tanii, T.; Funatsu, T.; Ohdomari, I. Patterning of DNA Nanostructures on Silicon Surface by Electron Beam Lithography of Self-Assembled Monolayer Chem. Commun. 2004, 786-787 (Pubitemid 38530235)
-
(2004)
Chemical Communications
, Issue.7
, pp. 786-787
-
-
Zhang, G.-J.1
Tanii, T.2
Funatsu, T.3
Ohdomari, I.4
-
21
-
-
72849124554
-
In Situ Synthesis and Direct Immobilization of ssDNA on Electron Beam Patterned Hydrogen Silsesquioxane
-
Negrete, O. D.; Onses, M. S.; Nealey, P. F.; Cerrina, F. In Situ Synthesis and Direct Immobilization of ssDNA on Electron Beam Patterned Hydrogen Silsesquioxane J. Vac. Sci. Technol. B 2009, 27, 3082-3087
-
(2009)
J. Vac. Sci. Technol. B
, vol.27
, pp. 3082-3087
-
-
Negrete, O.D.1
Onses, M.S.2
Nealey, P.F.3
Cerrina, F.4
-
22
-
-
0000877684
-
Determination of secondary electron yield from insulators due to a low-kV electron beam
-
Yong, Y. C.; Thong, J. T. L.; Phang, J. C. H. Determination of Secondary Electron Yield From Insulators Due to a Low-kV Electron Beam J. Appl. Phys. 1998, 84, 4543-4548 (Pubitemid 128592501)
-
(1998)
Journal of Applied Physics
, vol.84
, Issue.8
, pp. 4543-4548
-
-
Yong, Y.C.1
Thong, J.T.L.2
Phang, J.C.H.3
-
23
-
-
33749652440
-
Nanoscale patterning on insulating substrates by critical energy electron beam lithography
-
DOI 10.1021/nl061211q
-
Joo, J.; Chow, B. Y.; Jacobson, J. M. Nanoscale Patterning on Insulating Substrates by Critical Energy Electron Beam Lithography Nano Lett. 2006, 6, 2021-2025 (Pubitemid 44555248)
-
(2006)
Nano Letters
, vol.6
, Issue.9
, pp. 2021-2025
-
-
Joo, J.1
Chow, B.Y.2
Jacobson, J.M.3
-
24
-
-
0027104847
-
Determination of fixed electron-beam-induced positive oxide charge
-
Bernstein, G. H.; Polchlopek, S. W.; Kamath, R.; Porod, W. Determination of Fixed Electron-Beam Induced Positive Oxide Charge Scanning 1992, 14, 345-349 (Pubitemid 23012886)
-
(1992)
Scanning
, vol.14
, Issue.6
, pp. 345-349
-
-
Bernstein, G.H.1
Polchlopek, S.W.2
Kamath, R.3
Porod, W.4
-
25
-
-
33748899091
-
Generation of Nano-Scaled DNA Patterns Through Electron-Beam Induced Charge Trapping
-
Chi, P. Y.; Lin, H. Y.; Liu, C. H.; Chen, C. D. Generation of Nano-Scaled DNA Patterns Through Electron-Beam Induced Charge Trapping Nanotechnology 2006, 17, 4854-4858
-
(2006)
Nanotechnology
, vol.17
, pp. 4854-4858
-
-
Chi, P.Y.1
Lin, H.Y.2
Liu, C.H.3
Chen, C.D.4
-
26
-
-
44249124790
-
Preparation of Gold Nanoparticle-DNA Conjugates
-
Wiley: New York, Chapter 12, Unit 12 2.
-
Taton, T. A. Preparation of Gold Nanoparticle-DNA Conjugates. Current Protocols in Nucleic Acid Chemistry; Wiley: New York, 2002; Chapter 12, Unit 12 2.
-
(2002)
Current Protocols in Nucleic Acid Chemistry
-
-
Taton, T.A.1
-
27
-
-
36049034689
-
Assembly of Nanoparticle Patterns with Single-Particle Resolution Using DNA-Mediated Charge Trapping Technique: Method and Applications
-
Lin, H. Y.; Tsai, L. C.; Chen, C. D. Assembly of Nanoparticle Patterns with Single-Particle Resolution Using DNA-Mediated Charge Trapping Technique: Method and Applications Adv. Funct. Mater. 2007, 17, 3182-3186
-
(2007)
Adv. Funct. Mater.
, vol.17
, pp. 3182-3186
-
-
Lin, H.Y.1
Tsai, L.C.2
Chen, C.D.3
-
28
-
-
0032575737
-
Response of flexible polymers to a sudden elongational flow
-
Smith, D. E.; Chu, S. Response of Flexible Polymers to a Sudden Elongational Flow Science 1998, 281, 1335-1340 (Pubitemid 28406822)
-
(1998)
Science
, vol.281
, Issue.5381
, pp. 1335-1340
-
-
Smith, D.E.1
Chu, S.2
-
29
-
-
0020849523
-
Secondary-Electron Emission in the Scanning Electron-Microscope
-
Seiler, H. Secondary-Electron Emission in the Scanning Electron-Microscope J. Appl. Phys. 1983, 54, R1-R18
-
(1983)
J. Appl. Phys.
, vol.54
-
-
Seiler, H.1
-
32
-
-
53349153204
-
Comparative Study of Thermally Cured and Electron-Beam-Exposed Hydrogen Silsesquioxane Resists
-
Choi, S.; Word, M. J.; Kumar, V.; Adesida, I. Comparative Study of Thermally Cured and Electron-Beam-Exposed Hydrogen Silsesquioxane Resists J. Vac. Sci. Technol. B 2008, 26, 1654-1659
-
(2008)
J. Vac. Sci. Technol. B
, vol.26
, pp. 1654-1659
-
-
Choi, S.1
Word, M.J.2
Kumar, V.3
Adesida, I.4
-
33
-
-
54949094682
-
Fabrication of Triangular Nanochannels Using the Collapse of Hydrogen Silsesquioxane Resists
-
Choi, S.; Yan, M.; Adesida, I. Fabrication of Triangular Nanochannels Using the Collapse of Hydrogen Silsesquioxane Resists Appl. Phys. Lett. 2008, 93 (16) 163113-1-3
-
(2008)
Appl. Phys. Lett.
, vol.93
, Issue.16
, pp. 1631131-1631133
-
-
Choi, S.1
Yan, M.2
Adesida, I.3
-
34
-
-
77957743471
-
Direct-Write Electron Beam Lithography in Silicon Dioxide at Low Energy
-
Beaumont, A.; Dubuc, C.; Beauvais, J.; Drouin, D. Direct-Write Electron Beam Lithography in Silicon Dioxide at Low Energy J. Vac. Sci. Technol. B 2010, 28, 940-945
-
(2010)
J. Vac. Sci. Technol. B
, vol.28
, pp. 940-945
-
-
Beaumont, A.1
Dubuc, C.2
Beauvais, J.3
Drouin, D.4
-
35
-
-
0024048153
-
Resolution Limits for Electron-Beam Lithography
-
Broers, A. N. Resolution Limits for Electron-Beam Lithography IBM J. Res. Dev. 1988, 32, 502-513
-
(1988)
IBM J. Res. Dev.
, vol.32
, pp. 502-513
-
-
Broers, A.N.1
-
36
-
-
4243125820
-
Application of Carbonaceous Material for Fabrication of Nano-Wires with a Scanning Electron Microscopy
-
Miura, N.; Ishii, H.; Yamada, A.; Konagai, M. Application of Carbonaceous Material for Fabrication of Nano-Wires with a Scanning Electron Microscopy Jpn. J. Appl. Phys. 2 1996, 35, L1089-L1091
-
(1996)
Jpn. J. Appl. Phys. 2
, vol.35
-
-
Miura, N.1
Ishii, H.2
Yamada, A.3
Konagai, M.4
-
37
-
-
33846381652
-
Deposition of DNA rafts on cationic SAMs on silicon [100]
-
DOI 10.1021/la0615948
-
Sarveswaran, K.; Hu, W. C.; Huber, P. W.; Bernstein, G. H.; Lieberman, M. Deposition of DNA Rafts on Cationic SAMs on Silicon [100] Langmuir 2006, 22, 11279-11283 (Pubitemid 46129673)
-
(2006)
Langmuir
, vol.22
, Issue.26
, pp. 11279-11283
-
-
Sarveswaran, K.1
Hu, W.2
Huber, P.W.3
Bernstein, G.H.4
Lieberman, M.5
-
38
-
-
33845573598
-
Maximizing DNA loading on a range of gold nanoparticle sizes
-
DOI 10.1021/ac0613582
-
Hurst, S. J.; Lytton-Jean, A. K. R.; Mirkin, C. A. Maximizing DNA Loading on a Range of Gold Nanoparticle Sizes Anal. Chem. 2006, 78, 8313-8318 (Pubitemid 44932099)
-
(2006)
Analytical Chemistry
, vol.78
, Issue.24
, pp. 8313-8318
-
-
Hurst, S.J.1
Lytton-Jean, A.K.R.2
Mirkin, C.A.3
-
39
-
-
0037090917
-
How to make a DNA chip
-
DOI 10.1002/1521-3773(20020415)41:8<1276::AID-ANIE1276>3.0.CO;2-2
-
Pirrung, M. C. How To Make a DNA Chip Angew. Chem., Int. Ed. 2002, 41 (8) 1276-1289 (Pubitemid 34437410)
-
(2002)
Angewandte Chemie - International Edition
, vol.41
, Issue.8
, pp. 1276-1289
-
-
Pirrung, M.C.1
-
40
-
-
0030825711
-
Characterization of DNA probes immobilized on gold surfaces
-
DOI 10.1021/ja9719586
-
Herne, T. M.; Tarlov, M. J. Characterization of DNA Probes Immobilized on Gold Surfaces J. Am. Chem. Soc. 1997, 119, 8916-8920 (Pubitemid 27421377)
-
(1997)
Journal of the American Chemical Society
, vol.119
, Issue.38
, pp. 8916-8920
-
-
Herne, T.M.1
Tarlov, M.J.2
-
41
-
-
0035873312
-
DNA microarrays based on noncovalent oligonucleotide attachment and hybridization in two dimensions
-
DOI 10.1006/abio.2001.5088
-
Belosludtsev, Y.; Iverson, B.; Lemeshko, S.; Eggers, R.; Wiese, R.; Lee, S.; Powdrill, T.; Hogan, M. DNA Microarrays Based on Noncovalent Oligonucleotide Attachment and Hybridization in Two Dimensions Anal. Biochem. 2001, 292, 250-256 (Pubitemid 32458092)
-
(2001)
Analytical Biochemistry
, vol.292
, Issue.2
, pp. 250-256
-
-
Belosludtsev, Y.1
Iverson, B.2
Lemeshko, S.3
Eggers, R.4
Wiese, R.5
Lee, S.6
Powdrill, T.7
Hogan, M.8
-
42
-
-
0030833627
-
Genosensor technology and the detection of interfacial nucleic acid chemistry
-
DOI 10.1016/S0003-2670(97)00206-7, PII S0003267097002067
-
Yang, M. S.; McGovern, M. E.; Thompson, M. Genosensor Technology and the Detection of Interfacial Nucleic Acid Chemistry Anal. Chim. Acta 1997, 346, 259-275 (Pubitemid 27303818)
-
(1997)
Analytica Chimica Acta
, vol.346
, Issue.3
, pp. 259-275
-
-
Yang, M.1
McGovern, M.E.2
Thompson, M.3
-
43
-
-
0028618275
-
Direct Fluorescence Analysis of Genetic Polymorphisms by Hybridization with Oligonucleotide Arrays on Glass Supports
-
Guo, Z.; Guilfoyle, R. A.; Thiel, A. J.; Wang, R. F.; Smith, L. M. Direct Fluorescence Analysis of Genetic Polymorphisms by Hybridization with Oligonucleotide Arrays on Glass Supports Nucleic Acids Res. 1994, 22, 5456-5465
-
(1994)
Nucleic Acids Res.
, vol.22
, pp. 5456-5465
-
-
Guo, Z.1
Guilfoyle, R.A.2
Thiel, A.J.3
Wang, R.F.4
Smith, L.M.5
-
44
-
-
57849158474
-
Sources of Overlay Error in Double Patterning Integration Schemes
-
Laidler, D.; D'have, P. L., K.; Cheng, S. Sources of Overlay Error in Double Patterning Integration Schemes P. Soc. Photo-opt. Ins. 2008, 6922, 69221E1-11
-
(2008)
P. Soc. Photo-opt. Ins.
, vol.6922
-
-
Laidler, D.1
D'Have, P.L..K.2
Cheng, S.3
-
45
-
-
76649107349
-
Large-Area Spatially Ordered Arrays of Gold Nanoparticles Directed by Lithographically Confined DNA Origami
-
Hung, A. M.; Micheel, C. M.; Bozano, L. D.; Osterbur, L. W.; Wallraff, G. M.; Cha, J. N. Large-Area Spatially Ordered Arrays of Gold Nanoparticles Directed by Lithographically Confined DNA Origami Nat. Nanotechnol. 2010, 5, 121-126
-
(2010)
Nat. Nanotechnol.
, vol.5
, pp. 121-126
-
-
Hung, A.M.1
Micheel, C.M.2
Bozano, L.D.3
Osterbur, L.W.4
Wallraff, G.M.5
Cha, J.N.6
-
48
-
-
35348824916
-
A novel EUV exposure station for nanotechnology studies
-
DOI 10.1016/j.nima.2007.08.124, PII S0168900207018372
-
Wallace, J.; Cheng, Y. C.; Isoyan, A.; Leonard, Q.; Fisher, M.; Green, M.; Bisognano, J.; Nealey, P. F.; Cerrina, F. A Novel EUVExposure Station for Nanotechnology Studies Nucl. Instrum. Methods A 2007, 582, 254-257 (Pubitemid 47576463)
-
(2007)
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
, vol.582
, Issue.1
, pp. 254-257
-
-
Wallace, J.1
Cheng, Y.-C.2
Isoyan, A.3
Leonard, Q.4
Fisher, M.5
Green, M.6
Bisognano, J.7
Nealey, P.8
Cerrina, F.9
-
49
-
-
0038021007
-
Sub-50 nm Period Patterns with EUV Interference Lithography
-
Solak, H. H.; David, C.; Gobrecht, J.; Golovkina, V.; Cerrina, F.; Kim, S. O.; Nealey, P. F. Sub-50 nm Period Patterns with EUV Interference Lithography Microelectron. Eng. 2003, 67-68, 56-62
-
(2003)
Microelectron. Eng.
, vol.6768
, pp. 56-62
-
-
Solak, H.H.1
David, C.2
Gobrecht, J.3
Golovkina, V.4
Cerrina, F.5
Kim, S.O.6
Nealey, P.F.7
-
50
-
-
0001482512
-
Exposure of 38 nm period grating patterns with extreme ultraviolet interferometric lithography
-
Solak, H. H.; He, D.; Li, W.; Singh-Gasson, S.; Cerrina, F.; Sohn, B. H.; Yang, X. M.; Nealey, P. F. Exposure of 38 nm Period Grating Patterns with Extreme Ultraviolet Interferometric Lithography Appl. Phys. Lett. 1999, 75, 2328-2330 (Pubitemid 129564262)
-
(1999)
Applied Physics Letters
, vol.75
, Issue.15
, pp. 2328-2330
-
-
Solak, H.H.1
He, D.2
Li, W.3
Singh-Gasson, S.4
Cerrina, F.5
Sohn, B.H.6
Yang, X.M.7
Nealey, P.8
-
51
-
-
45249085424
-
4X Reduction Extreme Ultraviolet Interferometric Lithography
-
Isoyan, A.; Wuest, A.; Wallace, J.; Jiang, F.; Cerrina, F. 4X Reduction Extreme Ultraviolet Interferometric Lithography Opt. Express 2008, 16, 9106-9111
-
(2008)
Opt. Express
, vol.16
, pp. 9106-9111
-
-
Isoyan, A.1
Wuest, A.2
Wallace, J.3
Jiang, F.4
Cerrina, F.5
|