Determination of secondary electron yield from insulators due to a low-kV electron beam

Journal of Applied Physics

Volumn 84, Issue 8, 1998, Pages 4543-4548

  Yong, Y C ^a   Thong, J T L ^a   Phang, J C H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000877684     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368700     Document Type: Article

References (22)

1. N. R. Whetten and A. B. Laponsky, J. Appl. Phys. 28, 515 (1957).
2. N. R. Whetten and A. B. Laponsky, J. Appl. Phys. 30, 432 (1959).
3. N. R. Whetten, J. Appl. Phys. 35, 3279 (1964).
4. Y. Kishimoto, T. Hayashi, M. Hashimoto, and T. Ohshima, J. Appl. Polym. Sci. 21, 2721 (1977).
5. Y. Kishimoto, T. Ohshima, M. Hashimoto, and T. Hayashi, J. Appl. Polym. Sci. 39, 2055 (1990).
6. H. Padamsee and A. Joshi, J. Appl. Phys. 50, 1112 (1979).
7. A. Shih, J. Yater, P. Pehrsson, J. Butler, C. Hor, and R. Abrams, J. Appl. Phys. 82, 1860 (1997).
8. H. Seiler, J. Appl. Phys. 54, R1 (1983).
9. T. E. Everhart and P. H. Hoff, J. Appl. Phys. 42, 5837 (1971).
10. D. M. Taylor and Q. H. Mehdi, J. Phys. D 12, 2253 (1979).
11. G. Lye and A. J. Dekker, Phys. Rev. 107, 977 (1957).
12. P. Hirsch, M. Kässens, M. Püttmann, and L. Reimer, Scanning 16, 101 (1994).
13. R. Böngeler, U. Golla, M. Kässens, L. Reimer, B. Schindler, R. Senkel, and M. Spranck, Scanning 15, 1 (1993).
14. L. Reimer, in Image Formation in Low-Voltage Scanning Electron Microscope, SPIE Optical Engineering Press (Bellingham, Washington, 1993), P. 68.
15. G. F. Dionne, J. Appl. Phys. 46, 3347 (1975).
16. K. Kanaya, S. Ono, and F. Ishigaki, J. Phys. D 11, 2425 (1978).
17. S. A. Schwarz, J. Appl. Phys. 68, 2382 (1990).
18. D. C. Joy, J. Microsc. 147, 51 (1987).
19. M. Salehi and E. A. Flinn. J. Appl. Phys. 52, 994 (1981).
20. M. Salehi and E. A. Flinn. J. Phys. D 13, 281 (1980).
21. K. Ohya, T. Itotani, and J. Kawata, Jpn. J. Appl. Phys., Part 1 33, 1153 (1994).
22. T. J. Shaffner and J. W. S. Hearle, Scanning Electron Microscopy, Proceedings of the Ninth Annual Scanning Electron Microscope Symposium, Part 1, 1976 (unpublished), p. 61.