In situ synthesis and direct immobilization of ssDNA on electron beam patterned hydrogen silsesquioxane

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 3082-3087

  Negrete, Omar D ^a,b   Onses, M Sendar ^b   Nealy, Paul F ^a,b   Cerrina, Franco ^b  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIODEVICE; COMPLEMENTARY STRAND; DNA SELF-ASSEMBLY; DNA SYNTHESISS; ELECTRON BEAM RESIST; FUNCTIONALIZED; GLASSY CARBON; HEXAMETHYLDISILAZANE; HIGH RESOLUTION; HYBRIDIZATION ASSAY; HYDROGEN PLASMAS; HYDROGEN SILSESQUIOXANE; IN-SITU; IN-SITU SYNTHESIS; LOW BACKGROUND; NEGATIVE TONES; SILICON SUBSTRATES; SOLID SUPPORTS; SUBMICRON; SUBMICRON PATTERNS; SUPPORT SUBSTRATE;

CHEMICAL PROPERTIES; DNA; ELECTRON BEAMS; FLUORESCENCE; GENES; HYDROGEN; NUCLEIC ACIDS; SUBSTRATES;

ELECTRON BEAM LITHOGRAPHY;

EID: 72849124554     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3263190     Document Type: Conference Paper

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