Silicon carbide phononic crystals for high f.Q micromechanical resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2010, Pages 162-166

  Ziaei Moayyed, M ^a   Su, M F ^b   Reinke, C M ^a   El Kady, I ^a   Olsson III, R H ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of New Mexico   (United States)

Author keywords

Acoustic Bandgap; Acoustic Cavity; Acoustic Resonator; Micromechanical resonator; Phononic Bandgap; Phononic Crystal Cavity; Phononic Crystals

Indexed keywords

ACOUSTIC BANDGAP; ACOUSTIC CAVITY; MICROMECHANICAL RESONATOR; PHONONIC BANDGAP; PHONONIC CRYSTAL;

ACOUSTIC FIELDS; ACOUSTIC TRANSDUCERS; ALUMINUM NITRIDE; COMMUNICATION SYSTEMS; CRYSTALS; ENERGY GAP; GLOBAL SYSTEM FOR MOBILE COMMUNICATIONS; NITRIDES; OPTICAL RESONATORS; PHONONS; PIEZOELECTRICITY; TRANSDUCERS; ULTRASONICS; WIRELESS TELECOMMUNICATION SYSTEMS;

SILICON CARBIDE;

EID: 80054773206     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2010.5935682     Document Type: Conference Paper

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