Microfabricated VHF acoustic crystals and waveguides

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 87-93

  Olsson III, Roy H ^a   El Kady, Ihab F ^a,b   Su, Mehmet F ^b   Tuck, Melanie R ^a   Fleming, James G ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of New Mexico   (United States)

Author keywords

Acoustic bandgap; Acoustic crystal; Aluminum nitride; Phononic bandgap; Phononic crystal; Waveguide

Indexed keywords

ACOUSTICS; CRYSTALLOGRAPHY; CRYSTALS; FABRICATION; MICROFABRICATION; POWDERS; SILICON COMPOUNDS; SOLIDS; TUNGSTEN;

PHOTOACOUSTIC EFFECT;

EID: 44849092228     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.10.081     Document Type: Article

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