SCOPUS 정보 검색 플랫폼

Applied Surface Science

Volumn 258, Issue 1, 2011, Pages 2-6

Wafer-level fabrication and optical characterization of nanoscale patterned sapphire substrates

(4) Lin, Yu Sheng a Hsu, Wen Ching b Huang, Kuo Cheng c Yeh, J Andrew a,c

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

b Sino American Silicon Productions Inc (Taiwan)

c INSTRUMENT TECHNOLOGY RESEARCH CENTER (Taiwan)

Author keywords

Antireflection; Natural lithography; Patterned sapphire

Indexed keywords

FABRICATION; INDUCTIVELY COUPLED PLASMA; LITHOGRAPHY; NANOSTRUCTURES; NICKEL COMPOUNDS; OPTICAL PROPERTIES; REFLECTION; SAPPHIRE; SILICIDES;

ANTI-REFLECTION; ANTIREFLECTIVE CHARACTERISTICS; INDUCTIVELY COUPLED PLASMA DRY ETCHING; NATURAL LITHOGRAPHY; OPTICAL CHARACTERIZATION; PATTERNED SAPPHIRE; PATTERNED SAPPHIRE SUBSTRATE; POLARIZATION PROPERTIES;

SUBSTRATES;

EID: 80054771088 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.07.117 Document Type: Article

Times cited : (28)

References (28)

1
- 1642475099
- W.J. Tropf, M.E. Thomas, and R.K. Frazer Proc. SPIE 5078 2003 80 89
- (2003) Proc. SPIE , vol.5078 , pp. 80-89
- Tropf, W.J.¹ Thomas, M.E.² Frazer, R.K.³

2
- 0033096750
- B.S Patel, and Z.H. Zaidi Meas. Sci. Technol. 10 1999 146 151
- (1999) Meas. Sci. Technol. , vol.10 , pp. 146-151
- Patel, B.S.¹ Zaidi, Z.H.²

3
- 33847674000
- L.P. Feng, Z.T. Liu, and Q. Li Appl. Surf. Sci. 253 2007 5363 5367
- (2007) Appl. Surf. Sci. , vol.253 , pp. 5363-5367
- Feng, L.P.¹ Liu, Z.T.² Li, Q.³

4
- 33645552797
- C.M. Liu, J.C. Chen, L.J. Hu, and S.P. Lin Mater. Sci. Eng. A 420 2006 212 219
- (2006) Mater. Sci. Eng. A , vol.420 , pp. 212-219
- Liu, C.M.¹ Chen, J.C.² Hu, L.J.³ Lin, S.P.⁴

5
- 0037458759
- H.Z. Durusoy, O. Duyar, A. Aydinli, and F. Ay Vacuum 70 2003 21 28
- (2003) Vacuum , vol.70 , pp. 21-28
- Durusoy, H.Z.¹ Duyar, O.² Aydinli, A.³ Ay, F.⁴

6
- 77951222709
- H. Miyake, T. Ishii, A. Motogaito, and K. Hiramatsu Phys. Stat. Sol. (c) 5 2008 1822 1824
- (2008) Phys. Stat. Sol. (C) , vol.5 , pp. 1822-1824
- Miyake, H.¹ Ishii, T.² Motogaito, A.³ Hiramatsu, K.⁴

7
- 0037110146
- H. Yoshida, Y. Terada, H. Miyake, and K. Hiramatsu Jpn. J. Appl. Phys 41 2002 L1134 L1136
- (2002) Jpn. J. Appl. Phys , vol.41
- Yoshida, H.¹ Terada, Y.² Miyake, H.³ Hiramatsu, K.⁴

8
- 0037104473
- C.C. Yu, C.F. Chu, J.Y. Tsai, H.W. Huang, T.H. Hsueh, C.F. Lin, and S.C. Wang Jpn. J. Appl. Phys 41 2002 L910 L912
- (2002) Jpn. J. Appl. Phys , vol.41
- Yu, C.C.¹ Chu, C.F.² Tsai, J.Y.³ Huang, H.W.⁴ Hsueh, T.H.⁵ Lin, C.F.⁶ Wang, S.C.⁷

9
- 0015840393
- P.B. Clapham, and M.C. Hutley Nature 244 1973 281 282
- (1973) Nature , vol.244 , pp. 281-282
- Clapham, P.B.¹ Hutley, M.C.²

10
- 62549138713
- J.Y. Chyan, W.C. Hsu, and J.A. Yeh Opt. Exp. 17 2009 4646 4651
- (2009) Opt. Exp. , vol.17 , pp. 4646-4651
- Chyan, J.Y.¹ Hsu, W.C.² Yeh, J.A.³

11
- 0031164097
- P. Lalanne, and G.M. Morris Nanotechnology 8 1997 53 56
- (1997) Nanotechnology , vol.8 , pp. 53-56
- Lalanne, P.¹ Morris, G.M.²

12
- 44149099068
- K. Nishioka, S. Horita, K. Ohdaira, and H. Matsumura Sol. Energy Mater. Sol. Cells 92 2008 919 922
- (2008) Sol. Energy Mater. Sol. Cells , vol.92 , pp. 919-922
- Nishioka, K.¹ Horita, S.² Ohdaira, K.³ Matsumura, H.⁴

13
- 34547850255
- H. Sai, H. Fujii, K. Arafune, Y. Ohshita, Y. Kanamori, H. Yugami, and M. Yamaguchi Jpn. J. Appl. Phys. 46 2007 3333 3336
- (2007) Jpn. J. Appl. Phys. , vol.46 , pp. 3333-3336
- Sai, H.¹ Fujii, H.² Arafune, K.³ Ohshita, Y.⁴ Kanamori, Y.⁵ Yugami, H.⁶ Yamaguchi, M.⁷

14
- 0041360458
- Y. Kanamori, K. Kobayashi, H. Yugami, and K. Hane Jpn. J. Appl. Phys. 42 2003 4020 4023
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 4020-4023
- Kanamori, Y.¹ Kobayashi, K.² Yugami, H.³ Hane, K.⁴

15
- 0013301622
- K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano Opt. Lett. 26 2001 1624 1642
- (2001) Opt. Lett. , vol.26 , pp. 1624-1642
- Kintaka, K.¹ Nishii, J.² Mizutani, A.³ Kikuta, H.⁴ Nakano, H.⁵

16
- 79955987809
- C. Aydin, A. Zaslavsky, G.J. Sonek, and J. Goldstein Appl. Phys. Lett. 80 2002 2242 2244
- (2002) Appl. Phys. Lett. , vol.80 , pp. 2242-2244
- Aydin, C.¹ Zaslavsky, A.² Sonek, G.J.³ Goldstein, J.⁴

17
- 70349306516
- Y.K. Ee, J.M. Biser, W. Cao, H.M. Chan, R.P. Vinci, and N. Tansu IEEE J. Sel. Topics Quantum Electron. 15 2009 1066 1072
- (2009) IEEE J. Sel. Topics Quantum Electron. , vol.15 , pp. 1066-1072
- Ee, Y.K.¹ Biser, J.M.² Cao, W.³ Chan, H.M.⁴ Vinci, R.P.⁵ Tansu, N.⁶

18
- 28044463809
- H. Park, H.M. Chan, and R.P. Vinci J. Mater. Res. 20 2005 417 423
- (2005) J. Mater. Res. , vol.20 , pp. 417-423
- Park, H.¹ Chan, H.M.² Vinci, R.P.³

19
- 33745021179
- K. Nakano, M. Imura, G. Narita, T. Kitano, Y. Hirose, N. Fujimoto, N. Okada, T. Kawashima, K. Iida, K. Balakrishnan, M. Tsuda, M. Iwaya, S. Kamiyama, H. Amano, and I. Akasaki Phys. Stat. Sol. (a) 203 2006 1632 1635
- (2006) Phys. Stat. Sol. (A) , vol.203 , pp. 1632-1635
- Nakano, K.¹ Imura, M.² Narita, G.³ Kitano, T.⁴ Hirose, Y.⁵ Fujimoto, N.⁶ Okada, N.⁷ Kawashima, T.⁸ Iida, K.⁹ Balakrishnan, K.¹⁰ Tsuda, M.¹¹ Iwaya, M.¹² Kamiyama, S.¹³ Amano, H.¹⁴ Akasaki, I.¹⁵

20
- 58149215871
- J. Lee, D. Kim, J. Kim, and H. Jeon Curr. Appl. Phys. 9 2009 633 635
- (2009) Curr. Appl. Phys. , vol.9 , pp. 633-635
- Lee, J.¹ Kim, D.² Kim, J.³ Jeon, H.⁴

21
- 62549113073
- J. Lee, S. Ahn, S. Kim, D. Kim, H. Jeon, S. Lee, and J.H. Baek Appl. Phys. Lett. 94 2009 101105-1 101105-3
- (2009) Appl. Phys. Lett. , vol.94 , pp. 1011051-1011053
- Lee, J.¹ Ahn, S.² Kim, S.³ Kim, D.⁴ Jeon, H.⁵ Lee, S.⁶ Baek, J.H.⁷

22
- 38149104688
- H. Gao, F. Yan, Y. Zhang, J. Li, Y. Zeng, and G. Wang J. Appl. Phys. 103 2008 014314-1 014314-5
- (2008) J. Appl. Phys. , vol.103 , pp. 0143141-0143145
- Gao, H.¹ Yan, F.² Zhang, Y.³ Li, J.⁴ Zeng, Y.⁵ Wang, G.⁶

23
- 49349094168
- B.J. Kim, M.A. Mastro, H. Jung, H.Y. Kim, S.H. Kim, R.T. Holm, J. Hite, C.R. Eddy Jr., J. Bang, and J. Kim Thin Solid Films 516 2008 7744 7747
- (2008) Thin Solid Films , vol.516 , pp. 7744-7747
- Kim, B.J.¹ Mastro, M.A.² Jung, H.³ Kim, H.Y.⁴ Kim, S.H.⁵ Holm, R.T.⁶ Hite, J.⁷ Eddy, Jr.C.R.⁸ Bang, J.⁹ Kim, J.¹⁰

24
- 79953882930
- H. Xu, N. Lu, G. Shi, D. Qi, B. Yang, H. Li, W. Xu, and L. Chi Langmuir 27 2011 4963 4967
- (2011) Langmuir , vol.27 , pp. 4963-4967
- Xu, H.¹ Lu, N.² Shi, G.³ Qi, D.⁴ Yang, B.⁵ Li, H.⁶ Xu, W.⁷ Chi, L.⁸

25
- 78650717114
- S. Chattopadhyay, Y.F. Huang, Y.J. Jen, A. Ganguly, K.H. Chen, and L.C. Chen Mater. Sci. Eng. R 69 2010 1 35
- (2010) Mater. Sci. Eng. R , vol.69 , pp. 1-35
- Chattopadhyay, S.¹ Huang, Y.F.² Jen, Y.J.³ Ganguly, A.⁴ Chen, K.H.⁵ Chen, L.C.⁶

26
- 34547850819
- S. Wang, X.Z. Yu, and H.T. Fan Appl. Phys. Lett. 91 2007 061105-1 061105-3
- (2007) Appl. Phys. Lett. , vol.91 , pp. 0611051-0611053
- Wang, S.¹ Yu, X.Z.² Fan, H.T.³

27
- 0001748167
- Y.J. Cho, Y.W. Lee, H.M. Cho, and I.W. Lee J. Appl. Phys. 85 1999 1114 1119
- (1999) J. Appl. Phys. , vol.85 , pp. 1114-1119
- Cho, Y.J.¹ Lee, Y.W.² Cho, H.M.³ Lee, I.W.⁴

28
- 59849093641
- C.H. Chang, P. Yu, and C.S. Yang Appl. Phys. Lett. 94 2009 051114-1 051114-3
- (2009) Appl. Phys. Lett. , vol.94 , pp. 0511141-0511143
- Chang, C.H.¹ Yu, P.² Yang, C.S.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.