Influence of substrate temperature and bias voltage on the optical transmittance of TiN films

Vacuum

Volumn 70, Issue 1, 2003, Pages 21-28

  Durusoy, H Zafer ^a   Duyar, Özlem ^a   Aydinli, Atilla ^b   Ay, Feridun ^b  

^a HACETTEPE UNIVERSITY   (Turkey)

^b BILKENT UNIVERSITY   (Turkey)

Author keywords

AR coating; Electrical resistance; Optical transmittance; Titanium nitride

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; OPACITY; SCANNING TUNNELING MICROSCOPY; TITANIUM NITRIDE; X RAY DIFFRACTION;

SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 0037458759     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00663-2     Document Type: Article

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