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Nanotechnology
Volumn 8, Issue 2, 1997, Pages 53-56
Antireflection behavior of silicon subwavelength periodic structures for visible light
Author keywords

[No Author keywords available]
Indexed keywords

ANTIREFLECTION COATINGS; COMPUTER SIMULATION; DIFFRACTION GRATINGS; HOLOGRAPHY; MASKS; PHOTORESISTS; REACTIVE ION ETCHING; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;
EID: 0031164097     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/8/2/002     Document Type: Article
Times cited : (273)
References (11)
  • 2
    • 0003025786 scopus 로고
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    • (1967) Endeavor , vol.26 , pp. 79-84
    • Bernhard, C.G.1
  • 3
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    • The optical properties of 'moth eye' antireflection surfaces
    • Wilson S J and Hutley M C 1982 The optical properties of 'moth eye' antireflection surfaces Optica Acta 29 993-1009
    • (1982) Optica Acta , vol.29 , pp. 993-1009
    • Wilson, S.J.1    Hutley, M.C.2
  • 4
    • 0020829261 scopus 로고
    • Optical elements with ultrahigh spatial-frequency surface corrugations
    • Enger R C and Case SK 1983 Optical elements with ultrahigh spatial-frequency surface corrugations Appl. Opt. 22 3220-8
    • (1983) Appl. Opt. , vol.22 , pp. 3220-3228
    • Enger, R.C.1    Case, S.K.2
  • 5
    • 84975604806 scopus 로고
    • Antireflection surfaces in silicon using binary optics technology
    • Motamedi M E, Southwell W H and Gunning W J 1992 Antireflection surfaces in silicon using binary optics technology Appl. Opt. 31 4371-6
    • (1992) Appl. Opt. , vol.31 , pp. 4371-4376
    • Motamedi, M.E.1    Southwell, W.H.2    Gunning, W.J.3
  • 6
    • 84950993600 scopus 로고
    • Subwavelength structured surfaces and their applications
    • Critical Reviews of Optical Science and Technology
    • Raguin D H, Norton S and Morris G M 1993 Subwavelength structured surfaces and their applications Critical Reviews of Optical Science and Technology (SPIE Proc. CR49) pp 234-61
    • (1993) SPIE Proc. , vol.CR49 , pp. 234-261
    • Raguin, D.H.1    Norton, S.2    Morris, G.M.3
  • 7
    • 84975609725 scopus 로고
    • Pyramid-array surface-relief structures producing antireflection index matching on optical surfaces
    • Southwell WH 1991 Pyramid-array surface-relief structures producing antireflection index matching on optical surfaces J. Opt. Soc. Am. A 8 549-53
    • (1991) J. Opt. Soc. Am. A , vol.8 , pp. 549-553
    • Southwell, W.H.1
  • 8
    • 0027588452 scopus 로고
    • Analysis of antireflection-structured surfaces with continuous one-dimensional surface profiles
    • Raguin D H and Morris G M 1993 Analysis of antireflection-structured surfaces with continuous one-dimensional surface profiles Appl. Opt. 32 2582-98
    • (1993) Appl. Opt. , vol.32 , pp. 2582-2598
    • Raguin, D.H.1    Morris, G.M.2
  • 9
    • 0029244349 scopus 로고
    • Optimal design for antireflective tapered two-dimensional subwavelength grating structures
    • Grann E B, Moharam M G and Pommet D A 1995 Optimal design for antireflective tapered two-dimensional subwavelength grating structures J. Opt. Soc. Am. A 12 333-9
    • (1995) J. Opt. Soc. Am. A , vol.12 , pp. 333-339
    • Grann, E.B.1    Moharam, M.G.2    Pommet, D.A.3
  • 10
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    • Coupled-wave analysis of two-dimensional gratings
    • Holographic Optics: Design and Applications, ed I Cindrich
    • Moharam M G 1988 Coupled-wave analysis of two-dimensional gratings, Holographic Optics: Design and Applications, ed I Cindrich Proc. Soc. Photo-Opt. Instrum. Eng. 883 8-11
    • (1988) Proc. Soc. Photo-Opt. Instrum. Eng. , vol.883 , pp. 8-11
    • Moharam, M.G.1

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.