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Volumn 520, Issue 1, 2011, Pages 251-257

In-situ inspection of cracking in atomic-layer-deposited barrier films on surface and in buried structures

(4) Zhang, Yadong a,b Yang, Ronggui a,b George, Steven M a Lee, Yung Cheng a,b

a UNIVERSITY OF COLORADO (United States)

b University of Colorado at Boulder (United States)

Author keywords

Atomic layer deposition; Cracks; Deflection bending; Flexible substrates; Inspection; Laser scanning confocal microscopy; Thin films

Indexed keywords

ATOMIC LAYER DEPOSITED; BARRIER FILMS; BARRIER PROTECTION; BURIED LAYER; BURIED STRUCTURE; FILM CRACKING; FLEXIBLE SUBSTRATE; IN-SITU; IN-SITU CHARACTERIZATION; LASER SCANNING CONFOCAL MICROSCOPY; LAYER STRUCTURES; MECHANICAL BENDING; NANO SCALE; NON DESTRUCTIVE; STRESS-INDUCED;

ATOMIC LAYER DEPOSITION; ATOMS; CONFOCAL MICROSCOPY; CRACKS; LASER APPLICATIONS; SOLIDS; STRESSES; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

INSPECTION;

EID: 80054034719 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.07.056 Document Type: Article

Times cited : (24)

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