Permeation barrier properties of thin oxide films on flexible polymer substrates

Thin Solid Films

Volumn 517, Issue 10, 2009, Pages 3075-3080

  Fahlteich, John ^a   Fahland, Matthias ^a   Schönberger, Waldemar ^a   Schiller, Nicolas ^a  

^a Fraunhofer Institute for Electron Beam and Plasma Technology   (Germany)

Author keywords

Aluminium oxide; Encapsulation; Flexible electronics; Magnetron PECVD; Permeation barrier; Reactive sputtering; Zinc tin oxide

Indexed keywords

ALUMINUM; MAGNETRONS; MECHANICAL STABILITY; MULTILAYERS; OXIDES; OXYGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMER FILMS; TIN; TITANIUM COMPOUNDS; WATER VAPOR; ZINC;

ALUMINIUM OXIDE; FLEXIBLE ELECTRONICS; FLEXIBLE POLYMER SUBSTRATES; KEY PARAMETERS; MULTI-LAYER STACKS; MULTILAYER BARRIERS; OPTICAL TRANSMISSION SPECTRUM; ORGANIC ELECTRONIC DEVICES; OXYGEN PERMEABILITIES; PERMEATION BARRIER; PERMEATION MEASUREMENTS; PROCESS PARAMETERS; TEMPERATURE DEPENDENTS; TEMPERATURE STABILITIES; THIN OXIDE FILMS; UV STABILITIES; WATER VAPOURS; WORK GROUPS;

OXIDE FILMS;

EID: 61449083612     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.11.089     Document Type: Article

References (25)

1. Olsen L.C., Kundu S.N., Bonham C.C., and Gross M. Photovoltaics Specialists Conference, January 3-7, 2005, Conference Record of the Thirty-First IEEE (2005) 327
2. Dennler G., Lungenschmied C., Neugebauer H., Sariciftci H.S., Latreche M., Czeremuszkin G., and Wertheimer M.R. Thin Solid Films 511 (2006) 349
3. International Electrotechnical Commission, IEC-61646 - Thin-film terrestrial photovoltaic (PV) modules - Design qualification and type approval (1997).
4. Prins W., and Hermans J.J. J. Phys. Chem. 63 (1959) 716
5. Beu T.A., and Mercea P.-V. Mater. Chem. Phys. 26 (1990) 309
6. Decker W., and Henry B. 45th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2002) 492 ISSN 0737-5921
7. Erlat A.G., Yan M., Kim T.W., Schaepkens M., Liu J., Heller C.M., McConnolee P., Feist T., and Duggal A.R. 48th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2005) 116
8. Carcia P.F., McLean R.S., Reilly M.H., Groner M.D., and George S.M. Appl. Phys. Lett. 89 (2006) 031915
9. Graff G.L., Williford R.E., and Burrows P.E. J. Appl. Phys. 96 (2004) 1840
10. Langowski H.-C. 46th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2003) 559
11. Moro L.L., Krajewski T., Rutherford N.M., Philips O., Visser R., Gross M.E., Bennett W.D., and Graff G.L. Proc. SPIE 5214 (2004) 83
12. Fahlteich J., Fahland M., and Schiller N. 50th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2007) 723
13. Charton C., Fahland M., and Schiller N. 48th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2005) 623
14. Berg S., and Nyberg T. Thin Solid Films 476 (2005) 215
15. MacDonald W.A., Looney M.K., MacKerron D., Eveson R., Adam R., Hashimoto K., and Rakos K. J. Soc. Inf. Disp. 15 (2007) 1075
16. A. Plessing, H.-C. Langowski, U. Moosheimer, European Patent EP1018166B1 (1999).
17. Charton C., Schiller N., Fahland M., Hollaender A., Wedel A., and Noller K. Thin Solid Films 502 (2006) 99
18. Henry B.M., Assender H.E., Erlat A.G., Grovenor C.R.M., Briggs G.A.D., Miyamoto T., and Tsukahara Y. 47th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2004) 609
19. Leterrier Y. Prog. Mater. Sci. 48 (2003) 1
20. Banerjee A.N., Ghosh C.K., Chattopadhyay K.K., Minoura H., Sarkar A.K., Akiba A., Kamiya A., and Endo T. Thin Solid Films 496 (2006) 112
21. Koidis C., Logothetidis S., Laskarakis A., Tsiaoussis I., and Frangis N. Micron 40 1 (2009) 130
22. Henry B.M., Topping A.J., Searle A., Assender H.E., Grovenor C.R.M., Creatre M., and van de Sanden M.C.M. 50th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2007) 700
23. Thornton J.A. J. Vac. Sci. Technol. 11 (1974) 666
24. Fahland M., Vogt T., Meyer B., Fahlteich J., and Schiller N. Thin Solid Films 517 (2009) 3043 10.1016/j.tsf.2008.11.085 (this issue)
25. Henry B.M., Erlat A.G., McGuigan A., Grovenor C.R.M., Briggs G.A.D., Tsukahara Y., Miyamoto T., Noguchi N., and Niijima T. Thin Solid Films 382 (2001) 194