Active MEMS valves for flow control in a high-pressure micro-gas-analyzer

Journal of Microelectromechanical Systems

Volumn 20, Issue 5, 2011, Pages 1150-1162

  Galambos, Paul ^a   Lantz, Jeffrey ^a   Baker, Michael S ^a   McClain, Jaime ^a   Bogart, Gregory R ^a   Simonson, Robert Joseph ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Chemical analysis; electrostatic devices; fluid flow control; valves

Indexed keywords

BONDING LAYERS; CMOS COMPATIBLE; CONTROL VOLTAGES; DEAD VOLUMES; ELECTROSTATIC MEMS; FLOWPATH; GAS VALVES; HIGH OPERATING PRESSURE; HIGH-FLOW RATE; HIGHLY INTEGRATED; LEAK RATE; MASS PRODUCTION; MICRO VALVES; MICROFABRICATION PROCESS; OPERATING PRESSURE; PASSIVE VALVES; PERFORMANCE LEVEL; VALVE DESIGN;

CHEMICAL ANALYSIS; DESIGN; ELECTROSTATIC DEVICES; ELECTROSTATICS; FLOW OF FLUIDS; FLOW RATE; VALVES (MECHANICAL);

FLOW CONTROL;

EID: 80053573650     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2163299     Document Type: Article

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