Low leak rate MEMS valves for micro-gas-analyzer flow control

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1658-1661

  Galambos, Paul ^a   Lantz, J W ^a   James, C D ^a   McClain, J L ^a   Baker, M ^a   Anderson, R ^a   Simonson, R J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Electrostatic; MEMS microvalve; Micro gas analyzer

Indexed keywords

ELECTROSTATIC MEMS; GAS CHROMATOGRAPHS; HIGH PRESSURE; HIGH-FLOW RATE; LEAK RATE; LOW PRESSURES; MICRO VALVES; MICRO-GAS; MICROFABRICATION PROCESS; MICROMACHINED; VALVE COMPONENTS;

ACTUATORS; COMPUTATIONAL FLUID DYNAMICS; ELECTROSTATICS; FLOW CONTROL; GASES; LEAKAGE (FLUID); MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; POLYSILICON; PUMPS; VALVES (MECHANICAL);

SOLID-STATE SENSORS;

EID: 71549131917     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285749     Document Type: Conference Paper

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